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Patent Assignment Details

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Reel/Frame:	057228/0601			Pages:	6
		Recorded:	04/21/2021
Attorney Dkt #:	0114970.249US2
Conveyance:	CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE ADDRESS PREVIOUSLY RECORDED AT REEL: 055554 FRAME: 0595. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME.

Total properties: 11

Patent #:	10497591	Issue Dt:	12/03/2019	Application #:	15267698	Filing Dt:	09/16/2016
Publication #:	US20170271187	Pub Dt:	09/21/2017
Title:	LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME

Patent #:	10643882	Issue Dt:	05/05/2020	Application #:	15680510	Filing Dt:	08/18/2017
Publication #:	US20180053682	Pub Dt:	02/22/2018
Title:	CERAMIC RING WITH A LADDER STRUCTURE

Patent #:	11731145	Issue Dt:	08/22/2023	Application #:	15930594	Filing Dt:	05/13/2020
Publication #:	US20200360943	Pub Dt:	11/19/2020
Title:	MULTIPLE SECTION SHOWERHEAD ASSEMBLY

Patent #:	NONE	Issue Dt:		Application #:	16104184	Filing Dt:	08/17/2018
Publication #:	US20190057842	Pub Dt:	02/21/2019
Title:	RF SIGNAL TRANSMITTING DEVICE USED IN PLASMA PROCESSING APPARATUS

Patent #:	10410909	Issue Dt:	09/10/2019	Application #:	16132780	Filing Dt:	09/17/2018
Publication #:	US20190096736	Pub Dt:	03/28/2019
Title:	WAFFER PEDESTAL AND SUPPORT STRUCTURE THEREOF

Patent #:	11088012	Issue Dt:	08/10/2021	Application #:	16376205	Filing Dt:	04/05/2019
Publication #:	US20200161166	Pub Dt:	05/21/2020
Title:	WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MANUFACTURING THE SAME

Patent #:	NONE	Issue Dt:		Application #:	16400323	Filing Dt:	05/01/2019
Publication #:	US20190341280	Pub Dt:	11/07/2019
Title:	WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDING THE SAME

Patent #:	11562891	Issue Dt:	01/24/2023	Application #:	16699169	Filing Dt:	11/29/2019
Publication #:	US20200176231	Pub Dt:	06/04/2020
Title:	METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSING APPARATUS FOR SEMICONDUCTOR

Patent #:	NONE	Issue Dt:		Application #:	16711942	Filing Dt:	12/12/2019
Publication #:	US20200203197	Pub Dt:	06/25/2020
Title:	MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

Patent #:	11437253	Issue Dt:	09/06/2022	Application #:	16887017	Filing Dt:	05/29/2020
Publication #:	US20200381270	Pub Dt:	12/03/2020
Title:	WAFER PEDESTAL WITH CONTACT ARRAY

Patent #:	11767592	Issue Dt:	09/26/2023	Application #:	17110516	Filing Dt:	12/03/2020
Publication #:	US20210172063	Pub Dt:	06/10/2021
Title:	GAS-DISPERSING APPARATUS FOR MULTIPLE CHEMICAL RESOURCES

Assignor

Exec Dt:

01/12/2021

Assignee

NO. 900 SHUIJIA, HUNNAN INDUSTRIAL ZONE

SHENYANG, CHINA

Correspondence name and address
	LOCKE LORD LLP
	P.O. BOX 55874
	BOSTON, MA 02205

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