Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 044391/0602 | |
| Pages: | 6 |
| | Recorded: | 12/13/2017 | | |
| Attorney Dkt #: | KLA-103 (P4970) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/19/2019
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Application #:
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15789992
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Filing Dt:
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10/21/2017
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Publication #:
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Pub Dt:
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04/26/2018
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Title:
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Calibration Of A Small Angle X-Ray Scatterometry Based Metrology System
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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JOSEPH S SPANO
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851 BURLWAY ROAD, SUITE 407
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BURLINGAME, CA 94010
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