Patent Assignment Details
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Reel/Frame: | 013939/0606 | |
| Pages: | 3 |
| | Recorded: | 09/03/2003 | | |
Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09795715
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Filing Dt:
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02/28/2001
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Publication #:
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Pub Dt:
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10/04/2001
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Title:
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DENSE-PLASMA ETCHING OF INP-BASED MATERIALS USING CHLORINE AND NITROGEN
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Assignee
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ONE BROADWAY, 14TH FLOOR |
CAMBRIDGE, MASSACHUSETTS 02142 |
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Correspondence name and address
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EDWARDS & ANGELL, LLP
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HOWARD M. GITTEN
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P.O. BOX 9169
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BOSTON, MA 02209
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