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203
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Patent #:
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Issue Dt:
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01/01/2002
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Application #:
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09424575
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Filing Dt:
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01/07/2000
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Title:
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LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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01/18/2005
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Application #:
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10218223
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Filing Dt:
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08/13/2002
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Publication #:
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Pub Dt:
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02/13/2003
| | | | |
Title:
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LITHOGRAPHY SYSTEM COMPRISING A CONVERTER PLATE AND MEANS FOR PROTECTING THE CONVERTER PLATE
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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10391956
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Filing Dt:
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03/19/2003
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Publication #:
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Pub Dt:
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11/27/2003
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Title:
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DIRECT WRITE LITHOGRAPHY SYSTEM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10392228
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Filing Dt:
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03/18/2003
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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Field emission photo-cathode array for lithography system and lithography system provided with such an array
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Patent #:
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Issue Dt:
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08/02/2011
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Application #:
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10510082
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Filing Dt:
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11/28/2007
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Publication #:
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Pub Dt:
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09/11/2008
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Title:
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STAGE DEVICE FOR A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10600953
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Filing Dt:
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06/20/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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ADJUSTMENT IN A MAPPER SYSTEM
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Patent #:
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Issue Dt:
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10/25/2005
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Application #:
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10692632
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Filing Dt:
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10/24/2003
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Publication #:
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Pub Dt:
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07/15/2004
| | | | |
Title:
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LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10699246
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Filing Dt:
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10/30/2003
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Publication #:
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Pub Dt:
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07/22/2004
| | | | |
Title:
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ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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05/08/2007
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Application #:
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10778787
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Filing Dt:
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02/13/2004
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Publication #:
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Pub Dt:
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02/09/2006
| | | | |
Title:
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SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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10797364
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Filing Dt:
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03/10/2004
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Publication #:
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Pub Dt:
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11/25/2004
| | | | |
Title:
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APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
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Patent #:
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Issue Dt:
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08/01/2006
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Application #:
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10856050
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Filing Dt:
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05/27/2004
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Publication #:
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Pub Dt:
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07/28/2005
| | | | |
Title:
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CHARGED PARTICLE BEAMLET EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10909167
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Filing Dt:
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07/29/2004
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Publication #:
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Pub Dt:
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03/24/2005
| | | | |
Title:
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MODULATOR CIRCUITRY
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Patent #:
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Issue Dt:
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11/18/2008
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Application #:
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11118162
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Filing Dt:
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04/29/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
Title:
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CHARGED PARTICLE BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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08/15/2006
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Application #:
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11128512
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Filing Dt:
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05/12/2005
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Publication #:
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Pub Dt:
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09/29/2005
| | | | |
Title:
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ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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04/10/2012
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Application #:
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11149893
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Filing Dt:
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06/10/2005
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Publication #:
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Pub Dt:
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10/13/2005
| | | | |
Title:
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DIRECT WRITE LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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02/06/2007
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Application #:
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11225604
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Filing Dt:
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09/12/2005
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Publication #:
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Pub Dt:
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01/12/2006
| | | | |
Title:
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OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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11492572
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Filing Dt:
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07/24/2006
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Publication #:
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Pub Dt:
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02/08/2007
| | | | |
Title:
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RELIABILITY IN A MASKLESS LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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05/04/2010
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Application #:
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11521671
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Filing Dt:
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09/15/2006
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
Title:
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LITHOGRAPHY SYSTEM AND PROJECTION METHOD
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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11521705
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Filing Dt:
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09/14/2006
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Publication #:
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Pub Dt:
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03/15/2007
| | | | |
Title:
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LITHOGRAPHY SYSTEM, SENSOR AND MEASURING METHOD
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Patent #:
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Issue Dt:
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04/29/2008
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Application #:
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11527206
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Filing Dt:
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09/25/2006
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
Title:
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APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
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Patent #:
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Issue Dt:
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06/24/2008
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Application #:
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11544980
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Filing Dt:
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10/06/2006
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Publication #:
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Pub Dt:
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02/08/2007
| | | | |
Title:
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APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
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Patent #:
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Issue Dt:
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03/25/2008
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Application #:
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11545975
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Filing Dt:
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10/10/2006
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Publication #:
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Pub Dt:
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03/27/2008
| | | | |
Title:
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APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
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Patent #:
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Issue Dt:
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08/04/2009
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Application #:
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11545976
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Filing Dt:
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10/10/2006
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Publication #:
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Pub Dt:
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02/08/2007
| | | | |
Title:
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APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
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Patent #:
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Issue Dt:
|
05/04/2010
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Application #:
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11650310
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Filing Dt:
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01/05/2007
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Publication #:
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Pub Dt:
|
08/09/2007
| | | | |
Title:
|
SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
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Patent #:
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Issue Dt:
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08/14/2012
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Application #:
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11653107
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Filing Dt:
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01/11/2007
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Publication #:
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Pub Dt:
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08/16/2007
| | | | |
Title:
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OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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11/30/2010
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Application #:
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11716452
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Filing Dt:
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03/09/2007
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Publication #:
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Pub Dt:
|
03/27/2008
| | | | |
Title:
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LITHOGRAPHY SYSTEM AND PROJECTION METHOD
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Patent #:
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Issue Dt:
|
12/04/2012
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Application #:
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11880833
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Filing Dt:
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07/24/2007
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Publication #:
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Pub Dt:
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01/31/2008
| | | | |
Title:
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LITHOGRAPHY SYSTEM, METHOD OF HEAT DISSIPATION AND FRAME
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Patent #:
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Issue Dt:
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03/13/2012
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Application #:
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11880872
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Filing Dt:
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07/23/2007
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Publication #:
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Pub Dt:
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01/31/2008
| | | | |
Title:
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MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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11/03/2009
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Application #:
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11982119
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Filing Dt:
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11/01/2007
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Publication #:
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Pub Dt:
|
03/13/2008
| | | | |
Title:
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LITHOGRAPHY SYSTEM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12041634
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Filing Dt:
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03/03/2008
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Publication #:
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Pub Dt:
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07/03/2008
| | | | |
Title:
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OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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12041635
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Filing Dt:
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03/03/2008
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Publication #:
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Pub Dt:
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07/03/2008
| | | | |
Title:
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OPTICAL SWITCHING IN LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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05/28/2013
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Application #:
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12189817
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Filing Dt:
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08/12/2008
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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04/22/2014
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Application #:
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12218080
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Filing Dt:
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07/11/2008
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Publication #:
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Pub Dt:
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01/29/2009
| | | | |
Title:
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Lithography system, method of clamping and wafer table
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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12288877
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Filing Dt:
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10/24/2008
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Publication #:
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Pub Dt:
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03/12/2009
| | | | |
Title:
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CHARGED PARTICLE BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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01/03/2012
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Application #:
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12393049
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Filing Dt:
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02/26/2009
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Publication #:
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Pub Dt:
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08/27/2009
| | | | |
Title:
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PROJECTION LENS ARRANGEMENT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12393050
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Filing Dt:
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02/26/2009
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Publication #:
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Pub Dt:
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10/22/2009
| | | | |
Title:
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PROJECTION LENS ARRANGEMENT
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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12542478
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Filing Dt:
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08/17/2009
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Publication #:
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Pub Dt:
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02/25/2010
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE
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Patent #:
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Issue Dt:
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09/03/2013
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Application #:
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12611847
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Filing Dt:
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11/03/2009
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Publication #:
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Pub Dt:
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02/25/2010
| | | | |
Title:
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LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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04/30/2013
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Application #:
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12613429
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Filing Dt:
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11/05/2009
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Publication #:
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Pub Dt:
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05/13/2010
| | | | |
Title:
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SIMULTANEOUS MEASUREMENT OF BEAMS IN LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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10/04/2016
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Application #:
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12708543
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Filing Dt:
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02/19/2010
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Publication #:
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|
Pub Dt:
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10/21/2010
| | | | |
Title:
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METHOD OF CLAMPING A SUBSTRATE AND CLAMP PREPARATION UNIT USING CAPILLARY CLAMPING FORCE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12708544
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Filing Dt:
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02/19/2010
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Publication #:
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Pub Dt:
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02/24/2011
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Title:
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CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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04/08/2014
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Application #:
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12708545
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Filing Dt:
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02/19/2010
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Publication #:
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Pub Dt:
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10/28/2010
| | | | |
Title:
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CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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05/07/2013
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Application #:
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12709640
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
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09/23/2010
| | | | |
Title:
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PREPARATION UNIT FOR LITHOGRAPHY MACHINE
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12709643
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Filing Dt:
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02/22/2010
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Publication #:
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|
Pub Dt:
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10/28/2010
| | | | |
Title:
|
METHOD AND ARRANGEMENT FOR REALIZING A VACUUM IN A VACUUM CHAMBER
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Patent #:
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|
Issue Dt:
|
03/31/2015
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Application #:
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12709645
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
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09/23/2010
| | | | |
Title:
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Substrate Support Structure, Clamp Preparation Unit, and Lithography System
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12709647
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
|
03/03/2011
| | | | |
Title:
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Lithography Machine and Substrate Handling Arrangement
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Patent #:
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Issue Dt:
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08/14/2012
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Application #:
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12728965
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Filing Dt:
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03/22/2010
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Publication #:
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Pub Dt:
|
07/08/2010
| | | | |
Title:
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LITHOGRAPHY SYSTEM AND PROJECTION METHOD
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Patent #:
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|
Issue Dt:
|
08/21/2012
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Application #:
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12750619
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Filing Dt:
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03/30/2010
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Publication #:
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|
Pub Dt:
|
09/02/2010
| | | | |
Title:
|
SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
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|
Patent #:
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|
Issue Dt:
|
02/07/2012
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Application #:
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12769712
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Filing Dt:
|
04/29/2010
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Publication #:
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Pub Dt:
|
11/04/2010
| | | | |
Title:
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CHARGED PARTICLE OPTICAL SYSTEM COMPRISING AN ELECTROSTATIC DEFLECTOR
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|
Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12885380
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Filing Dt:
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09/17/2010
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Publication #:
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Pub Dt:
|
03/24/2011
| | | | |
Title:
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MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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01/07/2014
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Application #:
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12898665
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Filing Dt:
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10/05/2010
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Publication #:
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Pub Dt:
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04/14/2011
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Title:
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HIGH VOLTAGE SHIELDING ARRANGEMENT OF A CHARGED PARTICLE LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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01/29/2013
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Application #:
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12901468
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Filing Dt:
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10/08/2010
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Publication #:
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Pub Dt:
|
04/14/2011
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Title:
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ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY
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Patent #:
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Issue Dt:
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05/21/2013
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Application #:
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12905126
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Filing Dt:
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10/15/2010
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Publication #:
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Pub Dt:
|
04/19/2012
| | | | |
Title:
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PROJECTION LENS ARRANGEMENT
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Patent #:
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Issue Dt:
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09/04/2012
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Application #:
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12905131
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Filing Dt:
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10/15/2010
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Publication #:
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Pub Dt:
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04/19/2012
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Title:
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BEAMLET BLANKER ARRANGEMENT
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Patent #:
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Issue Dt:
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09/23/2014
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Application #:
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12911859
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Filing Dt:
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10/26/2010
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Publication #:
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Pub Dt:
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10/27/2011
| | | | |
Title:
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Modulation device and charged particle multi-beamlet lithography system using the same
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Patent #:
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Issue Dt:
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03/24/2015
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Application #:
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12911861
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Filing Dt:
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10/26/2010
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Publication #:
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Pub Dt:
|
11/03/2011
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Title:
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CHARGED PARTICLE MULTI-BEAMLET LITHOGRAPHY SYSTEM, MODULATION DEVICE , AND METHOD OF MANUFACTURING THEREOF
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Patent #:
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Issue Dt:
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07/23/2013
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Application #:
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12911911
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Filing Dt:
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10/26/2010
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Publication #:
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Pub Dt:
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10/27/2011
| | | | |
Title:
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Charged particle multi-beamlet lithography system with modulation device
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Patent #:
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Issue Dt:
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08/06/2013
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Application #:
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12960675
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Filing Dt:
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12/06/2010
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Publication #:
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Pub Dt:
|
03/31/2011
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Title:
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METHOD OF AND SYSTEM FOR EXPOSING A TARGET
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Patent #:
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Issue Dt:
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02/10/2015
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Application #:
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12970842
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Filing Dt:
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12/16/2010
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Publication #:
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Pub Dt:
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06/23/2011
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Title:
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SUPPORT AND POSITIONING STRUCTURE, SEMICONDUCTOR EQUIPMENT SYSTEM AND METHOD FOR POSITIONING
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Patent #:
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Issue Dt:
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10/29/2013
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Application #:
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12977240
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Filing Dt:
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12/23/2010
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Publication #:
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Pub Dt:
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08/11/2011
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Title:
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CAPACITIVE SENSING SYSTEM
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Patent #:
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Issue Dt:
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01/28/2014
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Application #:
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12977288
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Filing Dt:
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12/23/2010
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Publication #:
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Pub Dt:
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10/20/2011
| | | | |
Title:
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CAPACITIVE SENSING SYSTEM WITH DIFFERENTIAL PAIRS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12977346
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Filing Dt:
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12/23/2010
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Publication #:
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Pub Dt:
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10/27/2011
| | | | |
Title:
|
EXPOSURE METHOD
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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12977404
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Filing Dt:
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12/23/2010
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Publication #:
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Pub Dt:
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08/11/2011
| | | | |
Title:
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INTEGRATED SENSOR SYSTEM
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Patent #:
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Issue Dt:
|
08/06/2013
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Application #:
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12994230
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Filing Dt:
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11/23/2010
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Publication #:
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Pub Dt:
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04/07/2011
| | | | |
Title:
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IMAGING SYSTEM
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Patent #:
|
NONE
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Issue Dt:
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Application #:
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13010658
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Filing Dt:
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01/20/2011
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Publication #:
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Pub Dt:
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07/21/2011
| | | | |
Title:
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LITHOGRAPHY SYSTEM WITH LENS ROTATION
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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13030217
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Filing Dt:
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02/18/2011
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Publication #:
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Pub Dt:
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02/23/2012
| | | | |
Title:
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SUBSTRATE SUPPORT STRUCTURE, CLAMP PREPARATION UNIT, AND LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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05/29/2012
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Application #:
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13050875
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Filing Dt:
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03/17/2011
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Publication #:
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Pub Dt:
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07/07/2011
| | | | |
Title:
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MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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01/22/2013
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Application #:
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13053488
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Filing Dt:
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03/22/2011
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Publication #:
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Pub Dt:
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10/20/2011
| | | | |
Title:
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LITHOGRAPHY SYSTEM, SENSOR, CONVERTER ELEMENT AND METHOD OF MANUFACTURE
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Patent #:
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Issue Dt:
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02/11/2014
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Application #:
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13071225
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Filing Dt:
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03/24/2011
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Publication #:
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Pub Dt:
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07/14/2011
| | | | |
Title:
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MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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06/12/2012
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Application #:
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13076540
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Filing Dt:
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03/31/2011
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Publication #:
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Pub Dt:
|
09/08/2011
| | | | |
Title:
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ELECTROSTATIC LENS STRUCTURE
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Patent #:
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Issue Dt:
|
09/11/2012
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Application #:
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13082333
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Filing Dt:
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04/07/2011
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Publication #:
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Pub Dt:
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07/28/2011
| | | | |
Title:
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SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13237797
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Filing Dt:
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09/20/2011
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Publication #:
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Pub Dt:
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03/22/2012
| | | | |
Title:
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LITHOGRAPHY SYSTEM ARRANGED ON A FOUNDATION, AND METHOD FOR ARRANGING A LITHOGRAPHY SYSTEM ON SAID FOUNDATION
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13281558
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Filing Dt:
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10/26/2011
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Publication #:
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Pub Dt:
|
06/14/2012
| | | | |
Title:
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LITHOGRAPHY SYSTEM, MODULATION DEVICE AND METHOD OF MANUFACTURING A FIBER FIXATION SUBSTRATE
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Patent #:
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Issue Dt:
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12/30/2014
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Application #:
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13281559
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Filing Dt:
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10/26/2011
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Publication #:
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Pub Dt:
|
11/01/2012
| | | | |
Title:
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MODULATION DEVICE AND CHARGED PARTICLE MULTI-BEAMLET LITHOGRAPHY SYSTEM USING THE SAME
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13284634
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Filing Dt:
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10/28/2011
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Publication #:
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Pub Dt:
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02/23/2012
| | | | |
Title:
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OPTICAL SWITCHING IN A LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
|
04/05/2016
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Application #:
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13290139
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Filing Dt:
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11/07/2011
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Publication #:
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Pub Dt:
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11/15/2012
| | | | |
Title:
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DATA PATH FOR LITHOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
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11/11/2014
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Application #:
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13290141
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Filing Dt:
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11/07/2011
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Publication #:
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Pub Dt:
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11/15/2012
| | | | |
Title:
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DATA PATH FOR LITHOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
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12/03/2013
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Application #:
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13293370
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Filing Dt:
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11/10/2011
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Publication #:
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Pub Dt:
|
11/15/2012
| | | | |
Title:
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METHOD OF GENERATING A TWO-LEVEL PATTERN FOR LITHOGRAPHIC PROCESSING AND PATTERN GENERATOR USING THE SAME
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Patent #:
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Issue Dt:
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06/27/2017
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Application #:
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13293393
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Filing Dt:
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11/10/2011
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Publication #:
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Pub Dt:
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11/15/2012
| | | | |
Title:
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DUAL PASS SCANNING
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Patent #:
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Issue Dt:
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04/29/2014
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Application #:
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13293426
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Filing Dt:
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11/10/2011
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Publication #:
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Pub Dt:
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11/15/2012
| | | | |
Title:
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PATTERN DATA CONVERSION FOR LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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13295159
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
|
11/22/2012
| | | | |
Title:
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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS
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Patent #:
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Issue Dt:
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12/08/2015
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Application #:
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13295243
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
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06/14/2012
| | | | |
Title:
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Lithography system and method of refracting
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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13295246
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
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11/22/2012
| | | | |
Title:
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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH APERTURE ARRAY COOLING
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Patent #:
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Issue Dt:
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11/19/2013
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Application #:
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13295249
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
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11/22/2012
| | | | |
Title:
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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
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Patent #:
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Issue Dt:
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12/10/2013
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Application #:
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13295252
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
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11/22/2012
| | | | |
Title:
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CHARGED PARTICLE BEAM MODULATOR
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Patent #:
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Issue Dt:
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07/15/2014
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Application #:
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13298152
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Filing Dt:
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11/16/2011
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Publication #:
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Pub Dt:
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03/08/2012
| | | | |
Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND TARGET POSITIONING DEVICE
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Patent #:
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Issue Dt:
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08/11/2015
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Application #:
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13304427
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Filing Dt:
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11/25/2011
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Publication #:
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Pub Dt:
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03/15/2012
| | | | |
Title:
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PROJECTION LENS ARRANGEMENT
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Patent #:
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Issue Dt:
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11/25/2014
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Application #:
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13323950
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Filing Dt:
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12/13/2011
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Publication #:
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Pub Dt:
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07/12/2012
| | | | |
Title:
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LITHOGRAPHY SYSTEM AND METHOD OF PROCESSING SUBSTRATES IN SUCH A LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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05/27/2014
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Application #:
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13343036
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Filing Dt:
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01/04/2012
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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07/29/2014
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Application #:
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13343038
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Filing Dt:
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01/04/2012
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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11/11/2014
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Application #:
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13397703
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Filing Dt:
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02/16/2012
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Publication #:
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Pub Dt:
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02/21/2013
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Title:
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SYSTEM FOR MAGNETIC SHIELDING
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Patent #:
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Issue Dt:
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02/18/2014
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Application #:
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13397814
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Filing Dt:
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02/16/2012
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Publication #:
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Pub Dt:
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06/14/2012
| | | | |
Title:
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PROJECTION LENS ARRANGEMENT
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Patent #:
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Issue Dt:
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12/17/2013
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Application #:
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13402116
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Filing Dt:
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02/22/2012
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Publication #:
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Pub Dt:
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09/06/2012
| | | | |
Title:
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DIRECT WRITE LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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06/13/2017
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Application #:
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13436736
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Filing Dt:
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03/30/2012
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Publication #:
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Pub Dt:
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10/04/2012
| | | | |
Title:
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LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
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Patent #:
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Issue Dt:
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06/30/2015
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13436738
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03/30/2012
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Pub Dt:
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10/04/2012
| | | | |
Title:
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INTERFEROMETER MODULE
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Patent #:
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Issue Dt:
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02/16/2016
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13436741
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03/30/2012
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Publication #:
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Pub Dt:
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10/04/2012
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Title:
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ALIGNMENT OF AN INTERFEROMETER MODULE FOR USE IN AN EXPOSURE TOOL
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Patent #:
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Issue Dt:
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05/19/2015
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13452558
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04/20/2012
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Pub Dt:
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02/21/2013
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Title:
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ARRANGEMENT OF OPTICAL FIBERS, AND A METHOD OF FORMING SUCH ARRANGEMENT
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Patent #:
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Issue Dt:
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07/21/2015
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13452990
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04/23/2012
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Pub Dt:
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05/02/2013
| | | | |
Title:
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Network architecture and protocol for cluster of lithography machines
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Patent #:
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Issue Dt:
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01/26/2016
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13453008
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04/23/2012
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Publication #:
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Pub Dt:
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02/14/2013
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Title:
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NETWORK ARCHITECTURE FOR LITHOGRAPHY MACHINE CLUSTER
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Patent #:
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Issue Dt:
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07/19/2016
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Application #:
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13453986
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04/23/2012
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Pub Dt:
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10/25/2012
| | | | |
Title:
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POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HAVING A PARTIALLY REFLECTIVE POSITION MARK
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