Patent Assignment Details
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Reel/Frame: | 010880/0608 | |
| Pages: | 2 |
| | Recorded: | 06/16/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09595930
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Filing Dt:
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06/16/2000
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Title:
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TRANSFER MODULE AND CLUSTER SYSTEM FOR SEMICONDUCTOR MANUFACTURING PROCESS
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Assignee
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO, JAPAN 107-8 |
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Correspondence name and address
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PILLSBURY MADISON & SUTRO LLP
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GLENN J. PERRY
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INTELLECTUAL PROPERTY GROUP
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1100 NEW YORK AVENUE, NW, NINTH FLOOR
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WASHINGTON, DC 20005-3918
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