Patent Assignment Details
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| Reel/Frame: | 006983/0610 | |
| Pages: | 3 |
| | Recorded: | 05/13/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08185691
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Filing Dt:
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01/21/1994
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Title:
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RAPID THERMAL PROCESSING APPARATUS FOR PROCESSING SEMICONDUCTOR WAFERS
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Assignee
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| 81 EAST DAGGETT DRIVE |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON ET AL
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FORREST E. GUNNISON
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CA 95110
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