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Reel/Frame:063266/0613   Pages: 4
Recorded: 04/08/2023
Attorney Dkt #:095714-1727
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
18118023
Filing Dt:
03/06/2023
Publication #:
Pub Dt:
01/04/2024
Title:
EUV SOURCE STABILIZATION APPARATUS AND METHOD
Assignors
1
Exec Dt:
09/25/2022
2
Exec Dt:
09/25/2022
3
Exec Dt:
09/25/2022
4
Exec Dt:
10/24/2022
5
Exec Dt:
09/23/2022
6
Exec Dt:
09/23/2022
Assignee
1
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK
HSINCHU, TAIWAN
Correspondence name and address
MCDERMOTT WILL & EMERY LLP
500 NORTH CAPITOL STREET, NW
WASHINGTON, DC 20001

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