Total properties:
34
|
|
Patent #:
|
|
Issue Dt:
|
11/15/2011
|
Application #:
|
11519242
|
Filing Dt:
|
09/11/2006
|
Title:
|
RF POWER CONTROL DEVICE FOR RF PLASMA APPLICATIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2011
|
Application #:
|
11566610
|
Filing Dt:
|
12/04/2006
|
Publication #:
|
|
Pub Dt:
|
06/05/2008
| | | | |
Title:
|
METHOD AND APPARATUS FOR PREVENTING THE FORMATION OF A PLASMA-INHIBITING SUBSTANCE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/10/2012
|
Application #:
|
11677786
|
Filing Dt:
|
02/22/2007
|
Publication #:
|
|
Pub Dt:
|
08/28/2008
| | | | |
Title:
|
ARC RECOVERY WITHOUT OVER-VOLTAGE FOR PLASMA CHAMBER POWER SUPPLIES USING A SHUNT SWITCH
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2012
|
Application #:
|
11941548
|
Filing Dt:
|
11/16/2007
|
Publication #:
|
|
Pub Dt:
|
05/21/2009
| | | | |
Title:
|
METHODS AND APPARATUS FOR SPUTTERING DEPOSITION USING DIRECT CURRENT
|
|
|
Patent #:
|
|
Issue Dt:
|
01/22/2013
|
Application #:
|
12212506
|
Filing Dt:
|
09/17/2008
|
Publication #:
|
|
Pub Dt:
|
01/08/2009
| | | | |
Title:
|
METHOD AND SYSTEM FOR CONTROLLING A VAPOR DEPOSITION PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2014
|
Application #:
|
12328831
|
Filing Dt:
|
12/05/2008
|
Publication #:
|
|
Pub Dt:
|
06/10/2010
| | | | |
Title:
|
DELIVERED ENERGY COMPENSATION DURING PLASMA PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2014
|
Application #:
|
12334490
|
Filing Dt:
|
12/14/2008
|
Publication #:
|
|
Pub Dt:
|
11/12/2009
| | | | |
Title:
|
APPARATUS, SYSTEM, AND METHOD FOR CONTROLLING A MATCHING NETWORK BASED ON INFORMATION CHARACTERIZING A CABLE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/25/2011
|
Application #:
|
12424138
|
Filing Dt:
|
04/15/2009
|
Publication #:
|
|
Pub Dt:
|
02/04/2010
| | | | |
Title:
|
POWER SUPPLY IGNITION SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2012
|
Application #:
|
12426720
|
Filing Dt:
|
04/20/2009
|
Publication #:
|
|
Pub Dt:
|
10/21/2010
| | | | |
Title:
|
DIRECTIONAL COUPLER
|
|
|
Patent #:
|
|
Issue Dt:
|
01/01/2013
|
Application #:
|
12435526
|
Filing Dt:
|
05/05/2009
|
Publication #:
|
|
Pub Dt:
|
11/11/2010
| | | | |
Title:
|
MULTI-FEED RF DISTRIBUTION SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2011
|
Application #:
|
12494026
|
Filing Dt:
|
06/29/2009
|
Publication #:
|
|
Pub Dt:
|
11/12/2009
| | | | |
Title:
|
METHOD AND APPARATUS FOR MODIFYING INTERACTIONS BETWEEN AN ELECTRICAL GENERATOR AND A NONLINEAR LOAD
|
|
|
Patent #:
|
|
Issue Dt:
|
02/07/2012
|
Application #:
|
12581822
|
Filing Dt:
|
10/19/2009
|
Publication #:
|
|
Pub Dt:
|
02/11/2010
| | | | |
Title:
|
INTERLEAVED SOFT SWITCHING BRIDGE POWER CONVERTER
|
|
|
Patent #:
|
|
Issue Dt:
|
12/11/2012
|
Application #:
|
12645285
|
Filing Dt:
|
12/22/2009
|
Publication #:
|
|
Pub Dt:
|
06/23/2011
| | | | |
Title:
|
EFFICIENT ACTIVE SOURCE IMPEDANCE MODIFICATION OF A POWER AMPLIFIER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/05/2013
|
Application #:
|
12647466
|
Filing Dt:
|
12/26/2009
|
Publication #:
|
|
Pub Dt:
|
06/17/2010
| | | | |
Title:
|
PREEMPTIVE PROTECTION FOR A POWER CONVERTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2012
|
Application #:
|
12650652
|
Filing Dt:
|
12/31/2009
|
Publication #:
|
|
Pub Dt:
|
07/01/2010
| | | | |
Title:
|
DUAL-MODE CONTROL OF A POWER GENERATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
01/01/2013
|
Application #:
|
12650753
|
Filing Dt:
|
12/31/2009
|
Publication #:
|
|
Pub Dt:
|
07/08/2010
| | | | |
Title:
|
METHOD AND APPARATUS FOR ADJUSTING THE REFERENCE IMPEDANCE OF A POWER GENERATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2012
|
Application #:
|
12698007
|
Filing Dt:
|
02/01/2010
|
Publication #:
|
|
Pub Dt:
|
08/05/2010
| | | | |
Title:
|
PASSIVE POWER DISTRIBUTION FOR MULTIPLE ELECTRODE INDUCTIVE PLASMA SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2013
|
Application #:
|
12701813
|
Filing Dt:
|
02/08/2010
|
Publication #:
|
|
Pub Dt:
|
08/19/2010
| | | | |
Title:
|
POWER SUPPLY DEVICE FOR PLASMA PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/27/2011
|
Application #:
|
12758018
|
Filing Dt:
|
04/11/2010
|
Publication #:
|
|
Pub Dt:
|
09/30/2010
| | | | |
Title:
|
DIRECT CURRENT SYSTEM, METHOD, AND APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2014
|
Application #:
|
12766913
|
Filing Dt:
|
04/25/2010
|
Publication #:
|
|
Pub Dt:
|
10/28/2010
| | | | |
Title:
|
DETECTING AND PREVENTING INSTABILITIES IN PLASMA PROCESSES
|
|
|
Patent #:
|
|
Issue Dt:
|
01/22/2013
|
Application #:
|
12791860
|
Filing Dt:
|
06/01/2010
|
Publication #:
|
|
Pub Dt:
|
12/02/2010
| | | | |
Title:
|
MOBILE MEDIA DEVICE ENCLOSURE, METHOD OF USE OF MOBILE MEDIA DEVICE ENCLOSURE, AND METHOD OF PROVIDING MOBILE MEDIA DEVICE ENCLOSURE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2012
|
Application #:
|
12830380
|
Filing Dt:
|
07/05/2010
|
Publication #:
|
|
Pub Dt:
|
06/30/2011
| | | | |
Title:
|
ENERGY CONVERSION SYSTEM WITH FAULT DETECTION AND INTERRUPTION
|
|
|
Patent #:
|
|
Issue Dt:
|
10/08/2013
|
Application #:
|
12859998
|
Filing Dt:
|
08/20/2010
|
Publication #:
|
|
Pub Dt:
|
02/23/2012
| | | | |
Title:
|
PROACTIVE ARC MANAGEMENT OF A PLASMA LOAD
|
|
|
Patent #:
|
|
Issue Dt:
|
04/09/2013
|
Application #:
|
13010647
|
Filing Dt:
|
01/20/2011
|
Publication #:
|
|
Pub Dt:
|
07/26/2012
| | | | |
Title:
|
IMPEDANCE-MATCHING NETWORK USING BJT SWITCHES IN VARIABLE-REACTANCE CIRCUITS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/13/2013
|
Application #:
|
13165021
|
Filing Dt:
|
06/21/2011
|
Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
COMPENSATION OF STRAY LIGHT INTERFERENCE IN SUBSTRATE TEMPERATURE MEASUREMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
05/06/2014
|
Application #:
|
13214165
|
Filing Dt:
|
08/20/2011
|
Publication #:
|
|
Pub Dt:
|
08/30/2012
| | | | |
Title:
|
METHOD AND APPARATUS FOR MODIFYING THE SENSITIVITY OF AN ELECTRICAL GENERATOR TO A NONLINEAR LOAD
|
|
|
Patent #:
|
|
Issue Dt:
|
05/07/2013
|
Application #:
|
13288712
|
Filing Dt:
|
11/03/2011
|
Publication #:
|
|
Pub Dt:
|
05/10/2012
| | | | |
Title:
|
HIGH FREQUENCY SOLID STATE SWITCHING FOR IMPEDANCE MATCHING
|
|
|
Patent #:
|
|
Issue Dt:
|
05/13/2014
|
Application #:
|
13356546
|
Filing Dt:
|
01/23/2012
|
Publication #:
|
|
Pub Dt:
|
07/26/2012
| | | | |
Title:
|
ELECTROSTATIC REMOTE PLASMA SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2014
|
Application #:
|
13425159
|
Filing Dt:
|
03/20/2012
|
Publication #:
|
|
Pub Dt:
|
09/27/2012
| | | | |
Title:
|
REMOTE PLASMA SOURCE GENERATING A DISC-SHAPED PLASMA
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2014
|
Application #:
|
13672543
|
Filing Dt:
|
11/08/2012
|
Publication #:
|
|
Pub Dt:
|
05/08/2014
| | | | |
Title:
|
ASPIRATING PARTICLE SENSOR FOR SMOKE DETECTION WITHIN AN ELECTRONICS ENCLOSURE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2014
|
Application #:
|
13681258
|
Filing Dt:
|
11/19/2012
|
Publication #:
|
|
Pub Dt:
|
12/05/2013
| | | | |
Title:
|
PASSIVE POWER DISTRIBUTION FOR MULTIPLE ELECTRODE INDUCTIVE PLASMA SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2014
|
Application #:
|
13785888
|
Filing Dt:
|
03/05/2013
|
Publication #:
|
|
Pub Dt:
|
07/18/2013
| | | | |
Title:
|
OVER-VOLTAGE PROTECTION DURING ARC RECOVERY FOR PLASMA-CHAMBER POWER SUPPLIES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/2014
|
Application #:
|
13846430
|
Filing Dt:
|
03/18/2013
|
Publication #:
|
|
Pub Dt:
|
10/17/2013
| | | | |
Title:
|
POWER SUPPLY DEVICE FOR PLASMA PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2014
|
Application #:
|
13846505
|
Filing Dt:
|
03/18/2013
|
Publication #:
|
|
Pub Dt:
|
08/29/2013
| | | | |
Title:
|
POWER SUPPLY DEVICE FOR PLASMA PROCESSING
|
|