Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 019158/0617 | |
| Pages: | 2 |
| | Recorded: | 04/13/2007 | | |
| Attorney Dkt #: | 2007P51012US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/02/2009
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Application #:
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11683648
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Filing Dt:
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03/08/2007
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Publication #:
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Pub Dt:
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09/11/2008
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Title:
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METHODS OF FORMING MASK PATTERNS ON SEMICONDUCTOR WAFERS THAT COMPENSATE FOR NONUNIFORM CENTER-TO-EDGE ETCH RATES DURING PHOTOLITHOGRAPHIC PROCESSING
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Assignee
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| 640 N. MCCARTHY BLVD. |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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HEATHER ROWLAND
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3000 CENTREGREEN WAY
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CARY, NC 27513
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