Patent Assignment Details
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Reel/Frame: | 008887/0619 | |
| Pages: | 5 |
| | Recorded: | 11/13/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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08969595
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Filing Dt:
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11/13/1997
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Title:
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PROCESS FOR REMOVING ETCHING RESIDUES, ETCHING MASK AND SILICON NITRIDE AND/OR SILICON DIOXIDE
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Assignee
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OLD ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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IBM CORPORATION
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ALISON D. MORTINGER
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INTELLECTUAL PROPERTY LAW
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DEPT. 18G BLDG. 300-482, 1580 RT. 52
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HOPEWELL JUNCTION, NY 12533
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