Total properties:
50
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Patent #:
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Issue Dt:
|
06/14/1994
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Application #:
|
07930615
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Filing Dt:
|
09/30/1992
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Title:
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SPIN-ON GLASS PROCESSING TECHNIQUE FOR THE FABRICATION OF SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
|
11/15/1994
|
Application #:
|
07962214
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Filing Dt:
|
01/26/1993
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Title:
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SOG WITH MOISTURE RESISTANT PROTECTIVE CAPPING LAYER
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Patent #:
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Issue Dt:
|
11/28/1995
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Application #:
|
07965264
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Filing Dt:
|
01/26/1993
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Title:
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MOISTURE-FREE SOG PROCESS
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Patent #:
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Issue Dt:
|
10/10/1995
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Application #:
|
08039485
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Filing Dt:
|
04/30/1993
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Title:
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MULTI-LEVEL INTERCONNECTION CMOS DEVICES WITH SOG
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Patent #:
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Issue Dt:
|
09/05/1995
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Application #:
|
08078166
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Filing Dt:
|
06/21/1993
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Title:
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PREVENTING OF VIA POISONING BY GLOW DISCHARGE INDUCED DESORPTION
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Patent #:
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Issue Dt:
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07/30/1996
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Application #:
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08196078
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Filing Dt:
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02/25/1994
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Title:
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HIGH PERFORMANCE PASSIVATION FOR SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
|
12/24/1996
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Application #:
|
08313091
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Filing Dt:
|
09/30/1994
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Title:
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METHOD OF PREPARING ANTIMONY DOPED SEMICONDUCTOR WITH INTRINSIC GETTERING
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Patent #:
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Issue Dt:
|
05/05/1998
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Application #:
|
08543497
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Filing Dt:
|
10/16/1995
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Title:
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STABILIZATION OF THE INTERFACE BETWEEN ALUMINUM AND TITANIUM NITRIDE
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Patent #:
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Issue Dt:
|
08/10/1999
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Application #:
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08666256
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Filing Dt:
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06/20/1996
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Title:
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SUBSTRTAE PROCESSING APPARATUS WITH NON-EVAPORABLE GETTER PUMP
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Patent #:
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Issue Dt:
|
06/13/2000
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Application #:
|
08794441
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Filing Dt:
|
02/04/1997
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Title:
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INTEGRATED PROCESSING FOR AN ETCH MODULE USING A HARD MASK TECHNIQUE
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Patent #:
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Issue Dt:
|
10/03/2000
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Application #:
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08979956
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Filing Dt:
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11/26/1997
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Title:
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STABILIZATION OF THE INTERFACE BETWEEN TIN AND A1 ALLOYS
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Patent #:
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Issue Dt:
|
10/17/2000
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Application #:
|
09010191
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Filing Dt:
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01/21/1998
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Title:
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METHOD OF PROTECTING LIGHT SENSITIVE REGIONS OF INTEGRATED CIRCUITS
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Patent #:
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Issue Dt:
|
07/31/2001
|
Application #:
|
09236101
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Filing Dt:
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01/25/1999
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Title:
|
METHOD OF FORMING CAPACITORS ON INTEGRATED CIRCUIT
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Patent #:
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Issue Dt:
|
07/04/2000
|
Application #:
|
09314105
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Filing Dt:
|
05/19/1999
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Title:
|
METHOD OF FORMING CAPACITORS IN A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
|
04/16/2002
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Application #:
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09652796
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Filing Dt:
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08/31/2000
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Title:
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SURFACE STABILIZATION OF SILICON RICH SILICA GLASS USING INCREASED POST DEPOSITION DELAY
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Patent #:
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Issue Dt:
|
07/29/2003
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Application #:
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09775465
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Filing Dt:
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02/05/2001
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Publication #:
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Pub Dt:
|
08/08/2002
| | | | |
Title:
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METHOD OF DEPOSITING A THICK DIELECTRIC FILM
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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09799491
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
|
05/30/2002
| | | | |
Title:
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METHOD OF MAKING A FUNCTIONAL DEVICE WITH DEPOSITED LAYERS SUBJECT TO HIGH TEMPERATURE ANNEAL
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Patent #:
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Issue Dt:
|
08/03/2004
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Application #:
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09799495
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
|
07/11/2002
| | | | |
Title:
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METHOD OF INSPECTING AN ANISOTROPIC ETCH IN A MICROSTRUCTURE
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09799496
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
|
06/13/2002
| | | | |
Title:
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MANUFACTURE OF SILICA WAVEGUIDES WITH MINIMAL ABSORPTION
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Patent #:
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Issue Dt:
|
08/05/2003
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Application #:
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09842836
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Filing Dt:
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04/27/2001
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Publication #:
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Pub Dt:
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10/31/2002
| | | | |
Title:
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MANUFACTURE OF INTEGRATED FLUIDIC DEVICES
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09848278
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Filing Dt:
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05/04/2001
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Publication #:
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Pub Dt:
|
02/21/2002
| | | | |
Title:
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METHOD OF FORMING SPACERS IN CMOS DEVICES
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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09910795
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Filing Dt:
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07/24/2001
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Publication #:
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Pub Dt:
|
01/30/2003
| | | | |
Title:
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MICRO-FLUIDIC DEVICES
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Patent #:
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Issue Dt:
|
04/29/2003
|
Application #:
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09923367
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Filing Dt:
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08/08/2001
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Publication #:
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Pub Dt:
|
02/13/2003
| | | | |
Title:
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METHOD OF ALIGNING STRUCTURES ON OPPOSITE SIDES OF A WAFER
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Patent #:
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Issue Dt:
|
04/06/2004
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Application #:
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09956916
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Filing Dt:
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09/21/2001
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Publication #:
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Pub Dt:
|
03/27/2003
| | | | |
Title:
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METHOD OF DEPOSITING AN OPTICAL QUALITY SILICA FILM BY PECVD
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Patent #:
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Issue Dt:
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02/01/2005
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Application #:
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09964472
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Filing Dt:
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09/28/2001
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Publication #:
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Pub Dt:
|
04/10/2003
| | | | |
Title:
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METHOD OF MAKING HIGH-VOLTAGE BIPOLAR/CMOS/DMOS (BCD) DEVICES
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Patent #:
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|
Issue Dt:
|
12/02/2003
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Application #:
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09987829
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Filing Dt:
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11/16/2001
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Publication #:
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Pub Dt:
|
05/22/2003
| | | | |
Title:
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METHOD OF MAKING SPECULAR INFRARED MIRRORS FOR USE IN OPTICAL DEVICES
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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10059117
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Filing Dt:
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01/31/2002
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Publication #:
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Pub Dt:
|
07/31/2003
| | | | |
Title:
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METHOD OF PREVENTING CRACKING IN OPTICAL QUALITY SILICA LAYERS
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10101622
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Filing Dt:
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03/21/2002
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Publication #:
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Pub Dt:
|
09/25/2003
| | | | |
Title:
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METHOD OF MAKING PHOTONIC DEVICES WITH SOG INTERLAYER
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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10120528
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Filing Dt:
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04/12/2002
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Title:
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WAFER-LEVEL MEMS PACKAGING
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10153593
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Filing Dt:
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05/24/2002
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Publication #:
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Pub Dt:
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11/27/2003
| | | | |
Title:
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FABRICATION OF MICROSTRUCTURES WITH VACUUM-SEALED CAVITY
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10226189
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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02/26/2004
| | | | |
Title:
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FABRICATION OF MEMS DEVICES WITH SPIN-ON GLASS
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Patent #:
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Issue Dt:
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11/21/2006
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Application #:
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10310814
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Filing Dt:
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12/06/2002
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Publication #:
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Pub Dt:
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04/08/2004
| | | | |
Title:
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WAFER LEVEL PACKAGING TECHNIQUE FOR MICRODEVICES
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Patent #:
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Issue Dt:
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12/21/2004
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Application #:
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10435043
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Filing Dt:
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05/12/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Title:
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A METHOD OF FORMING AN OPTICAL SENSOR DEVICE HAVING A COMPOSITE SANDWICH STRUCTURE OF ALTERNATING TITANIUM NITRIDE LAYERS
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Patent #:
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Issue Dt:
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12/05/2006
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Application #:
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10459619
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Filing Dt:
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06/12/2003
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Publication #:
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Pub Dt:
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10/20/2005
| | | | |
Title:
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METHOD OF FABRICATING SILICON-BASED MEMS DEVICES
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10839130
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Filing Dt:
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05/06/2004
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Publication #:
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Pub Dt:
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11/10/2005
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Title:
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METHOD OF MAKING ELECTRICAL CONNECTIONS TO HERMETICALLY SEALED MEMS DEVICES
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10864472
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06/10/2004
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Publication #:
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Pub Dt:
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12/15/2005
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Title:
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TITANIUM SILICATE FILMS WITH HIGH DIELECTRIC CONSTANT
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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11004973
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12/07/2004
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Publication #:
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Pub Dt:
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06/30/2005
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Title:
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HERMETIC WAFER-LEVEL PACKAGING FOR MEMS DEVICES WITH LOW-TEMPERATURE METALLURGY
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Patent #:
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03/11/2008
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11020217
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12/27/2004
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Publication #:
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Pub Dt:
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06/23/2005
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Title:
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METHOD OF MAKING HIGH-VOLTAGE BIPOLAR/CMOS/DMOS (BCD) DEVICES
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Patent #:
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08/25/2009
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11054946
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02/11/2005
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Publication #:
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Pub Dt:
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07/07/2005
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Title:
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FABRICATION OF MEMS DEVICES WITH SPIN-ON GLASS
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Patent #:
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10/21/2008
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11227065
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09/16/2005
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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METHOD OF MAKING A MEMS DEVICE CONTAINING A CAVITY WITH ISOTROPIC ETCH FOLLOWED BY ANISOTROPIC ETCH
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01/09/2007
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11242960
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10/05/2005
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Publication #:
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07/27/2006
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Title:
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FABRICATION OF ADVANCED SILICON-BASED MEMS DEVICES
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12/02/2008
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11254774
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10/21/2005
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Pub Dt:
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05/25/2006
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Title:
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METHOD OF FABRICATING SILICON-BASED MEMS DEVICES
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Patent #:
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Issue Dt:
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04/29/2008
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11314535
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12/22/2005
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Publication #:
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Pub Dt:
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09/21/2006
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Title:
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ANHYDROUS HF RELEASE OF PROCESS FOR MEMS DEVICES
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Patent #:
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Issue Dt:
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10/05/2010
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11424059
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06/14/2006
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01/18/2007
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Title:
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METHOD OF MAKING MEMS WAFERS
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Patent #:
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Issue Dt:
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12/06/2011
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11457911
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07/17/2006
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Publication #:
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Pub Dt:
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06/14/2007
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Title:
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METHOD FOR REMOVING RESIDUES FORMED DURING THE MANUFACTURE OF MEMS DEVICES
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Patent #:
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11/10/2009
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11561044
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11/17/2006
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Publication #:
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Pub Dt:
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06/14/2007
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Title:
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METHOD OF REDUCING STRESS-INDUCED MECHANICAL PROBLEMS IN OPTICAL COMPONENTS
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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11687287
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03/16/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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PROTECTION CAPSULE FOR MEMS DEVICES
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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11829646
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07/27/2007
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Pub Dt:
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01/29/2009
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Title:
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METHOD OF CONTROLLING FILM STRESS IN MEMS DEVICES
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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12045853
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03/11/2008
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Pub Dt:
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12/04/2008
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Title:
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MICROCHANNELS FOR BIOMEMS DEVICES
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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12651561
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Filing Dt:
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01/04/2010
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Publication #:
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Pub Dt:
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07/08/2010
| | | | |
Title:
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METHOD OF MAKING BIOMEMS DEVICES
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