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02/25/1992
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02/15/1994
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08/10/1993
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11/22/1994
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03/21/2000
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06/05/2001
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06/12/2001
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07/17/2003
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Filing Dt:
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03/15/2006
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Publication #:
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Pub Dt:
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08/17/2006
| | | | |
Title:
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TRANSDUCER ASSEMBLY FOR MAGASONIC PROCESSING OF AN ARTICLE AND APPARATUS UTILIZING THE SAME
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Patent #:
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05/01/2007
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11386634
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Filing Dt:
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03/22/2006
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08/10/2006
| | | | |
Title:
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APPARATUS FOR MEGASONIC PROCESSING OF AN ARTICLE
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NONE
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11454447
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06/15/2006
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Pub Dt:
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12/21/2006
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Title:
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System and method of processing substrates using sonic energy having cavitation control
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NONE
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11544802
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10/06/2006
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04/19/2007
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Title:
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System and method of cleaning substrates using a subambient process solution
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08/25/2009
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11595029
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11/09/2006
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03/15/2007
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Title:
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MEGASONIC CLEANING USING SUPERSATURATED SOLUTION
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01/12/2010
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11624445
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01/18/2007
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Title:
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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08/31/2010
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11625556
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01/22/2007
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07/26/2007
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Title:
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ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES
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NONE
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11625651
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01/22/2007
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Pub Dt:
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07/26/2007
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Title:
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SYSTEM APPARATUS AND METHODS FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY
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NONE
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11640718
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12/18/2006
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06/28/2007
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Title:
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Reciprocating megasonic probe
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NONE
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11649535
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01/04/2007
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05/31/2007
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Title:
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Process sequence for photoresist stripping and cleaning of photomasks for integrated circuit manufacturing
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05/24/2011
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11745866
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05/08/2007
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11/15/2007
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Title:
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SPRAY JET CLEANING APPARATUS AND METHOD
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NONE
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11755619
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05/30/2007
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Pub Dt:
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07/17/2008
| | | | |
Title:
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APPARATUS AND METHOD FOR PROCESSING A HYDROPHOBIC SURFACE OF A SUBSTRATE
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NONE
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11777252
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07/12/2007
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01/24/2008
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Title:
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TRANSDUCER ASSEMBLY INCORPORATING A TRANSMITTER HAVING THROUGH HOLES, AND METHOD AND SYSTEM FOR CLEANING A SUBSTRATE UTILIZING THE SAME
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08/02/2011
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11777256
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07/12/2007
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01/15/2009
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Title:
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COMBINATORIAL CODING/DECODING FOR ELECTRICAL COMPUTERS AND DIGITAL DATA PROCESSING SYSTEMS
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05/10/2011
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11781835
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07/23/2007
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07/31/2008
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Title:
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APPARATUS FOR EJECTING FLUID ONTO A SUBSTRATE AND SYSTEM AND METHOD INCORPORATING THE SAME
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11/23/2010
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11837292
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08/10/2007
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02/14/2008
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Title:
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APPARATUS AND METHOD OF MEASURING ACOUSTICAL ENERGY APPLIED TO A SUBSTRATE
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04/14/2009
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11839885
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08/16/2007
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Publication #:
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Pub Dt:
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01/10/2008
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Title:
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SYSTEM FOR MEGASONIC PROCESSING OF AN ARTICLE
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Patent #:
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NONE
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Application #:
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11841427
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08/20/2007
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Pub Dt:
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04/17/2008
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Title:
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SYSTEM AND METHOD FOR PROCESSING A SUBSTRATE UTILIZING A GAS STREAM FOR PARTICLE REMOVAL
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Patent #:
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Issue Dt:
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11/10/2009
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11873750
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10/17/2007
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10/30/2008
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Title:
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METHOD OF CLEANING SUBSTRATES UTILIZING MEGASONIC ENERGY
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Patent #:
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06/03/2014
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12070620
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02/19/2008
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Pub Dt:
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12/15/2011
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Title:
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Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting
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