Patent Assignment Details
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Reel/Frame: | 015125/0629 | |
| Pages: | 5 |
| | Recorded: | 03/23/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10688212
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Filing Dt:
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10/15/2003
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Publication #:
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Pub Dt:
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04/21/2005
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Title:
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COMPACT 1 1/2-WAIST SYSTEM FOR SUB 100NM ARF LITHOGRAPHY
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Assignee
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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DARBY & DARBY P.C.
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MELVIN C. GARNER
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P.O. BOX 5257
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NEW YORK, NY 10150-5257
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