Patent Assignment Details
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Reel/Frame: | 017769/0635 | |
| Pages: | 4 |
| | Recorded: | 06/12/2006 | | |
Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10150650
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Filing Dt:
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05/17/2002
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Publication #:
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Pub Dt:
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05/08/2003
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Assignee
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CARL-ZEISS-STR. 22 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
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ONE LANDMARK SQUARE, 10TH FLOOR
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STAMFORD, CT 06901
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