Patent Assignment Details
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Reel/Frame: | 031560/0636 | |
| Pages: | 3 |
| | Recorded: | 11/07/2013 | | |
Attorney Dkt #: | 4030-0345US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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14073996
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Filing Dt:
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11/07/2013
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Publication #:
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Pub Dt:
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05/15/2014
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Title:
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PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
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Assignee
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3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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ROTHWELL, FIGG, ERNST & MANBECK, P.C.
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607 14TH STREET, N.W.
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SUITE 800
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WASHINGTON, DC 20005
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