Patent Assignment Details
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| Reel/Frame: | 014825/0638 | |
| Pages: | 3 |
| | Recorded: | 12/18/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10643556
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Filing Dt:
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08/18/2003
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Publication #:
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Pub Dt:
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05/13/2004
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Title:
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Process and apparatus for pulsed dc magnetron reactive sputtering of thin film coatings on large substrates using smaller sputter cathodes
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Assignee
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| 1111 FRANKLIN STREET |
| OAKLAND, CALIFORNIA 94612-3550 |
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Correspondence name and address
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LAWRENCE LIVERMORE NAT. LABORATORY
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JAMES S. TAK
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PATENT GROUP, L-703
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7000 EAST AVENUE
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LIVERMORE, CA 94550
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