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Reel/Frame:056332/0638   Pages: 3
Recorded: 05/24/2021
Attorney Dkt #:36066-0039001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/04/2022
Application #:
17228150
Filing Dt:
04/12/2021
Publication #:
Pub Dt:
07/29/2021
Title:
METHOD FOR ADUSTING A FIRST ELEMENT OF A LITHOGRAPHY APPARATUS TOWARDS A SECOND ELEMENT OF A LITHOGRAPHY APPARATUS BY A TUNABLE SPACER
Assignor
1
Exec Dt:
05/02/2021
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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