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Patent Assignment Details
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Reel/Frame:014442/0639   Pages: 3
Recorded: 08/28/2003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/06/2005
Application #:
10649736
Filing Dt:
08/28/2003
Publication #:
Pub Dt:
03/11/2004
Title:
SUBSTRATE HOLDING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF RELEASING SUBSTRATE
Assignor
1
Exec Dt:
06/09/2003
Assignee
1
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME
HORIKAWA-KAMIKYO-KU KYOTO, JAPAN
Correspondence name and address
MCDERMOTT, WILL & EMERY
STEPHEN A. BECKER
600 13TH STREET, N.W.
WASHINGTON, D.C. 20005-3096

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