Total properties:
18
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Patent #:
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Issue Dt:
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01/17/2006
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Application #:
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11014961
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Filing Dt:
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12/20/2004
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Publication #:
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Pub Dt:
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08/04/2005
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Title:
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LIGHT SOURCE DEVICE AND EXPOSURE EQUIPMENT USING THE SAME
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Patent #:
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Issue Dt:
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09/18/2007
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Application #:
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11214819
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Filing Dt:
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08/31/2005
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Publication #:
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Pub Dt:
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08/24/2006
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11242016
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Filing Dt:
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10/04/2005
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Publication #:
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Pub Dt:
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04/13/2006
| | | | |
Title:
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LPP TYPE EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS AND DRIVER LASER FOR THE SAME
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Patent #:
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Issue Dt:
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02/06/2007
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Application #:
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11341636
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Filing Dt:
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01/30/2006
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Publication #:
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Pub Dt:
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08/10/2006
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
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Patent #:
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Issue Dt:
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10/27/2009
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Application #:
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11655109
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Filing Dt:
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01/19/2007
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Publication #:
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Pub Dt:
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07/26/2007
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Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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11723347
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Filing Dt:
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03/19/2007
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
Title:
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TARGET SUPPLIER
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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11730139
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
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Patent #:
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Issue Dt:
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01/19/2010
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Application #:
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11783387
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Filing Dt:
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04/09/2007
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Publication #:
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Pub Dt:
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08/16/2007
| | | | |
Title:
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LPP TYPE EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS AND DRIVER LASER FOR THE SAME
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Patent #:
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Issue Dt:
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03/29/2011
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Application #:
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11870020
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Filing Dt:
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10/10/2007
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Publication #:
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Pub Dt:
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04/17/2008
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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11902596
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Filing Dt:
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09/24/2007
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Publication #:
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Pub Dt:
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03/27/2008
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11976276
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Filing Dt:
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10/23/2007
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Publication #:
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Pub Dt:
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04/10/2008
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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|
Issue Dt:
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06/08/2010
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Application #:
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12071250
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Filing Dt:
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02/19/2008
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Publication #:
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Pub Dt:
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08/21/2008
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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|
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Patent #:
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|
Issue Dt:
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11/30/2010
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Application #:
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12071352
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Filing Dt:
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02/20/2008
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Publication #:
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Pub Dt:
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08/21/2008
| | | | |
Title:
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EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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Patent #:
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|
Issue Dt:
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02/01/2011
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Application #:
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12073001
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Filing Dt:
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02/28/2008
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Publication #:
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|
Pub Dt:
|
09/04/2008
| | | | |
Title:
|
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
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|
|
Patent #:
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|
Issue Dt:
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03/06/2012
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Application #:
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12150077
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Filing Dt:
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04/24/2008
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Publication #:
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Pub Dt:
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10/30/2008
| | | | |
Title:
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OPTICAL ELEMENT CONTAMINATION PREVENTING METHOD AND OPTICAL ELEMENT CONTAMINATION PREVENTING DEVICE OF EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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12382109
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Filing Dt:
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03/09/2009
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Publication #:
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|
Pub Dt:
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09/17/2009
| | | | |
Title:
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LASER SYSTEM
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Patent #:
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|
Issue Dt:
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05/08/2012
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Application #:
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12382964
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Filing Dt:
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03/27/2009
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Publication #:
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Pub Dt:
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07/08/2010
| | | | |
Title:
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EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
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|
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Patent #:
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|
Issue Dt:
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06/12/2012
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Application #:
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12469140
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Filing Dt:
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05/20/2009
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Publication #:
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Pub Dt:
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11/26/2009
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Title:
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MIRROR FOR EXTREME ULTRA VIOLET, MANUFACTURING METHOD FOR MIRROR FOR EXTREME ULTRA VIOLET, AND FAR ULTRAVIOLET LIGHT SOURCE DEVICE
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