Patent Assignment Details
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Reel/Frame: | 015060/0643 | |
| Pages: | 3 |
| | Recorded: | 03/05/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10794339
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Filing Dt:
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03/05/2004
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Publication #:
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Pub Dt:
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09/08/2005
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Title:
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OPTIMIZED OPTICAL LITHOGRAPHY ILLUMINATION SOURCE FOR USE DURING THE MANUFACTURE OF A SEMICONDUCTOR DEVICE
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Assignee
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MAIL STOP 01-525 |
8000 S. FEDERAL WAY |
BOISE, IDAHO 83716 |
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Correspondence name and address
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KEVIN D. MARTIN
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PATENT DEPARTMENT, MAIL STOP 1-525
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MICRON TECHNOLOGY,INC.
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8000 S. FEDERAL WAY
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BOISE, ID 83707-0006
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