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Patent Assignment Details

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Reel/Frame:	005573/0645			Pages:	14
		Recorded:	01/24/1991
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST.

Total properties: 13

Patent #:	4632057	Issue Dt:	12/30/1986	Application #:	06762231	Filing Dt:	08/05/1985
Title:	CVD PLASMA REACTOR

Patent #:	4632056	Issue Dt:	12/30/1986	Application #:	06762240	Filing Dt:	08/05/1985
Title:	CVD TEMPERATURE CONTROL

Patent #:	4640224	Issue Dt:	02/03/1987	Application #:	06762355	Filing Dt:	08/05/1985
Title:	CVD HEAT SOURCE

Patent #:	4607591	Issue Dt:	08/26/1986	Application #:	06762757	Filing Dt:	08/06/1985
Title:	CVD HEATER CONTROL CIRCUIT

Patent #:	4692343	Issue Dt:	09/08/1987	Application #:	06861793	Filing Dt:	05/12/1986
Title:	PLASMA ENHANCED CVD

Patent #:	5034745	Issue Dt:	07/23/1991	Application #:	06901905	Filing Dt:	08/29/1986
Title:	DATA ACQUISITION WITH VERNIER CONTROL

Patent #:	4737474	Issue Dt:	04/12/1988	Application #:	06931479	Filing Dt:	11/17/1986
Title:	SILICIDE TO SILICON BONDING PROCESS

Patent #:	4788416	Issue Dt:	11/29/1988	Application #:	07020278	Filing Dt:	03/02/1987
Title:	DIRECT WAFER TEMPERATURE CONTROL

Patent #:	4861563	Issue Dt:	08/29/1989	Application #:	07049489	Filing Dt:	05/14/1987
Title:	VACUUM LOAD LOCK

Patent #:	4749597	Issue Dt:	06/07/1988	Application #:	07109635	Filing Dt:	10/19/1987
Title:	PROCESS FOR CVD OF TUNGSTEN

Patent #:	4777061	Issue Dt:	10/11/1988	Application #:	07132739	Filing Dt:	12/14/1987
Title:	BLANKET TUNGSTEN DEPOSITION FOR DIELECTRIC

Patent #:	5084825	Issue Dt:	01/28/1992	Application #:	07164746	Filing Dt:	03/07/1988
Title:	PROCESS CONTROL WITH GUARD BAND AND FAULT LIMIT

Patent #:	4966869	Issue Dt:	10/30/1990	Application #:	07519538	Filing Dt:	05/04/1990
Title:	TUNGSTEN DISILICIDE CVD

Assignor

Exec Dt:

07/12/1990

Assignee

3821 E. BROADWAY ROAD

PHOENIX, ARIZONA 85040

Correspondence name and address
	CAHILL, SUTTON & THOMAS
	155 PARK ONE
	2141 E. HIGHLAND AVENUE
	PHOENIX, ARIZONA 85016

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