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Total properties:
20
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Patent #:
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Issue Dt:
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01/28/1986
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Application #:
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06496819
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Filing Dt:
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05/23/1983
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Title:
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RETICLE BAR CODE AND METHOD AND APPARATUS FOR READING SAME
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Patent #:
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Issue Dt:
|
02/03/1987
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Application #:
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06711587
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Filing Dt:
|
03/13/1985
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Title:
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MICROLITHOGRAPHIC CALIBRATION SCHEME
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Patent #:
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Issue Dt:
|
06/09/1987
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Application #:
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06723219
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Filing Dt:
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04/15/1985
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Title:
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APPARATUS AND METHOD FOR AUTOMATIC OPERATION OF A HIGH PRESSURE MERCURY ARC LAMP
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Patent #:
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Issue Dt:
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05/26/1987
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Application #:
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06802734
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Filing Dt:
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11/29/1985
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Title:
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MICROLITHOGRAPHIC RETICLE POSITIONING SYSTEM
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Patent #:
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Issue Dt:
|
04/16/1991
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Application #:
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07513783
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Filing Dt:
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04/23/1990
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Title:
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AUTOFOCUS SYSTEM FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
|
12/03/1991
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Application #:
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07539796
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Filing Dt:
|
06/18/1990
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Title:
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ACCUMULATED EXPOSURE DETECTION WITH EXPOSURE TERMINATING ATTENUATED
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Patent #:
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Issue Dt:
|
01/28/1992
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Application #:
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07548081
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Filing Dt:
|
07/05/1990
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Title:
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ROTATIONAL FLEXURE STAGE
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Patent #:
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Issue Dt:
|
03/10/1992
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Application #:
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07561540
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Filing Dt:
|
08/01/1990
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Title:
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APPARATUS AND METHOD FOR PROTECTING, INSTALLING AND REMOVING MERCURY- VAPOR LAMPS
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Patent #:
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Issue Dt:
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03/31/1992
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Application #:
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07601412
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Filing Dt:
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10/22/1990
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Title:
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DISTANCE AND TILT SENSING APPARATUS
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Patent #:
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Issue Dt:
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10/13/1992
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Application #:
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07632108
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Filing Dt:
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12/20/1990
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Title:
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LARGE APERTURE REFLECTIVE INTERFEROMETER FOR MEASURING CONVEX SPHERICAL SURFACES
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|
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Patent #:
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Issue Dt:
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11/24/1992
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Application #:
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07811820
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Filing Dt:
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12/20/1991
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Title:
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ILLUMINATOR FOR MICROLITHOGRAPHIC INTEGRATED CIRCUIT MANUFACTURE
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|
|
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Patent #:
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Issue Dt:
|
01/25/1994
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Application #:
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07940537
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Filing Dt:
|
09/04/1992
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Title:
|
PHOTOLITHOGRAPHIC REDUCTION IMAGING OF EXTENDED FIELD
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|
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Patent #:
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|
Issue Dt:
|
10/04/1994
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Application #:
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07957524
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Filing Dt:
|
10/06/1992
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|
Title:
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MOUNTING SYSTEM FOR OPTICAL ANNULUS IN LENS ASSEMBLY
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|
|
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Patent #:
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|
Issue Dt:
|
01/17/1995
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Application #:
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07981051
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Filing Dt:
|
11/24/1992
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|
Title:
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PARTIAL COHERENCE VARIER FOR MICROLITHOGRAPHIC SYSTEM
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|
|
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Patent #:
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Issue Dt:
|
10/25/1994
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Application #:
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08042150
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Filing Dt:
|
04/02/1993
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|
Title:
|
MICROLITHOGRAPHIC PROJECTION SYSTEM
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|
|
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Patent #:
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Issue Dt:
|
06/27/1995
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Application #:
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08079976
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Filing Dt:
|
06/18/1993
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|
Title:
|
DECOUPLED MOUNT FOR OPTICAL ELEMENT AND STACKED ANNULI ASSEMBLY
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|
|
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Patent #:
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Issue Dt:
|
09/19/1995
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Application #:
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08342787
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Filing Dt:
|
11/21/1994
|
|
Title:
|
VARIABLE ANNULAR ILLUMINATOR FOR PHOTOLITHOGRAPHIC PROJECTION IMAGER
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|
|
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Patent #:
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|
Issue Dt:
|
10/24/1995
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Application #:
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08395171
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Filing Dt:
|
02/27/1995
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|
Title:
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SPATIAL UNIFORMITY VARIER FOR MICROLITHOGRAPHIC ILLUMINATOR
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|
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Patent #:
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|
Issue Dt:
|
01/30/1996
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Application #:
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08404924
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Filing Dt:
|
03/16/1995
|
|
Title:
|
METHOD OF MOUNTING AN OPTICAL ELEMMENT
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|
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Patent #:
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|
Issue Dt:
|
05/26/1998
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Application #:
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08516521
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Filing Dt:
|
08/17/1995
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|
Title:
|
VARIABLE ANNULAR ILLUMINATOR FOR PHOTOLITHOGRAPHIC PROJECTION IMAGER
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