Patent Assignment Details
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Reel/Frame: | 010867/0656 | |
| Pages: | 4 |
| | Recorded: | 06/21/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09520831
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Filing Dt:
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03/08/2000
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Title:
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Plasma processing apparatus and method
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Assignee
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6 KANDA SURUGADAI 4-CHOME |
CHIYODA-KU, TOKYO 101-8010, JAPAN |
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Correspondence name and address
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ATSK, LLP
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MELVIN KRAUS
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1300 NORTH 17TH STREET
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SUITE 1800
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ARLINGTON, VA 22209
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