Patent Assignment Details
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Reel/Frame: | 016925/0657 | |
| Pages: | 6 |
| | Recorded: | 08/29/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/12/2008
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Application #:
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11150698
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Filing Dt:
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06/11/2005
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Publication #:
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Pub Dt:
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12/15/2005
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Title:
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FORMATION OF DOPED REGIONS AND/OR ULTRA-SHALLOW JUNCTIONS IN SEMICONDUCTOR MATERIALS BY GAS-CLUSTER ION IRRADIATION
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Assignee
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37 MANNING ROAD |
BILLERICA, MASSACHUSETTS 018212 |
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Correspondence name and address
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JERRY COHEN, ESQ.
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PERKINS, SMITH & COHEN, LLP
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ONE BEACON STREET
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BOSTON, MA 02108
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