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Patent Assignment Details
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Reel/Frame:024131/0659   Pages: 6
Recorded: 03/24/2010
Attorney Dkt #:5649-2880
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12730707
Filing Dt:
03/24/2010
Publication #:
Pub Dt:
09/30/2010
Title:
Illumination Control Module, and Diffraction Illumination System and Photolithography System Including the Same, and Methods of Fabricating Semiconductors Using the Same
Assignors
1
Exec Dt:
02/05/2010
2
Exec Dt:
02/05/2010
3
Exec Dt:
02/05/2010
Assignee
1
416 MAETAN-DONG
YEONGTONG-GU
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 000
Correspondence name and address
ANTHONY DEROSA
4140 PARKLAKE AVENUE, SUITE 600
RALEIGH, NC 27612

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