Patent Assignment Details
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Reel/Frame: | 007128/0664 | |
| Pages: | 2 |
| | Recorded: | 08/17/1994 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/27/1996
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Application #:
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08291636
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Filing Dt:
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08/17/1994
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Title:
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ENHANCEMENT IN THROUGHPUT AND PLANARITY DURING CMP USING A DIELECTRIC STACK CONTAINING HDP-SIO2 FILMS
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Assignee
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P.O. BOX 655474 M/S 219 |
DALLAS, TEXAS 75265 |
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Correspondence name and address
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RICHARD A. STOLTZ
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TEXAS INSTRUMENTS INCORPORATED
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P.O. BOX 655474, M/S 219
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DALLAS, TX 75265
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