Patent Assignment Details
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Reel/Frame: | 007968/0664 | |
| Pages: | 3 |
| | Recorded: | 06/03/1996 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/10/1998
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Application #:
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08619299
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Filing Dt:
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03/21/1996
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Title:
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METHOD OF AND APPARATUS FOR MONITORING ETCHING BY-PRODUCTS
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Assignee
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SAN 136-1, AMI-RI, BUBAL-EUB, ICHON-KUN |
KYOUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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MORGAN & FINNEGAN, L.L.P.
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LEIF R. SIGMOND, JR.
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345 APRK AVENUE
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NEW YORK, NY 10154
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