Patent Assignment Details
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| Reel/Frame: | 027349/0665 | |
| Pages: | 6 |
| | Recorded: | 12/08/2011 | | |
| Attorney Dkt #: | 21070-0071001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/01/2016
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Application #:
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13223458
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Filing Dt:
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09/01/2011
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Publication #:
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Pub Dt:
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03/22/2012
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Title:
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EUV MICROLITHOGRAPHY ILLUMINATION OPTICAL SYSTEM AND EUV ATTENUATOR FOR SAME
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Assignee
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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SEAN P. DALEY
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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