Patent Assignment Details
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| Reel/Frame: | 029182/0666 | |
| Pages: | 4 |
| | Recorded: | 10/24/2012 | | |
| Attorney Dkt #: | NVLS003775 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/12/2016
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Application #:
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13659231
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Filing Dt:
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10/24/2012
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Publication #:
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Pub Dt:
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12/26/2013
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Title:
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SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTEM BY SUPPRESSING PRECURSOR FLOW AND PLASMA OUTSIDE OF SUBSTRATE REGION
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Assignee
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| 4000 N. FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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P.O. BOX 828
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BLOOMFIELD HILLS, MI 48303
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