Patent Assignment Details
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Reel/Frame: | 056082/0666 | |
| Pages: | 3 |
| | Recorded: | 04/29/2021 | | |
Attorney Dkt #: | 42047-0061001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/03/2022
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Application #:
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17198973
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Filing Dt:
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03/11/2021
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Publication #:
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Pub Dt:
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07/01/2021
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Title:
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PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING A MAGNETIC DAMPING ARRANGEMENT
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Assignee
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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SEAN P. DALEY
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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09/26/2024 03:17 PM
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