Patent Assignment Details
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Reel/Frame: | 027295/0667 | |
| Pages: | 2 |
| | Recorded: | 11/29/2011 | | |
Attorney Dkt #: | 1133-294US02 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10715758
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Filing Dt:
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11/18/2003
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Publication #:
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Pub Dt:
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05/27/2004
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Title:
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DEEP REACTIVE ION ETCHING PROCESS AND MICROELECTROMECHANICAL DEVICES FORMED THEREBY
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Assignee
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5725 DELPHI DRIVE |
TROY, MICHIGAN 48098 |
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Correspondence name and address
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SHUMAKER & SIEFFERT, P.A.
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1625 RADIO DRIVE
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SUITE 300
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WOODBURY, MN 55125
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