Patent Assignment Details
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| Reel/Frame: | 011579/0672 | |
| Pages: | 3 |
| | Recorded: | 02/28/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09795754
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Filing Dt:
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02/28/2001
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Publication #:
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Pub Dt:
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08/29/2002
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Title:
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Post-etching cleaning process in dual damascene structure manufacturing
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Assignee
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| NO. 3, LI-HSIN RD. II, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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WU & ASSOCIATES
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CHARLES C.H. WU
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7700 IRVINE CENTER DRIVE, SUITE 710
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IRVINE, CA 92618-3043
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