Patent Assignment Details
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Reel/Frame: | 020517/0672 | |
| Pages: | 10 |
| | Recorded: | 02/15/2008 | | |
Attorney Dkt #: | 2007-064 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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12029710
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Filing Dt:
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02/12/2008
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Publication #:
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Pub Dt:
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08/13/2009
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Title:
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CLOSED LOOP CONTROL AND PROCESS OPTIMIZATION IN PLASMA DOPING PROCESSES USING A TIME OF FLIGHT ION DETECTOR
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Assignee
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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CHANGHOON CHOI, ESQ.
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35 DORY ROAD
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
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GLOUCESTER, MA 01930
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