Patent Assignment Details
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Reel/Frame: | 032562/0673 | |
| Pages: | 3 |
| | Recorded: | 03/31/2014 | | |
Attorney Dkt #: | 20617/ETCH/CONE |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/09/2016
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Application #:
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14206723
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Filing Dt:
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03/12/2014
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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METHODS FOR REDUCING ETCH NONUNIFORMITY IN THE PRESENCE OF A WEAK MAGNETIC FIELD IN AN INDUCTIVELY COUPLED PLASMA REACTOR
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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MOSER TABOADA/ALAN TABOADA
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1030 BROAD STREET
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SUITE 203
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SHREWSBURY, NJ 07702
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