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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09837506
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Filing Dt:
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04/18/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Title:
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POLISHING METHOD USING A RECONSTITUTED DRY PARTICULATE POLISHING COMPOSITION
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09847907
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Filing Dt:
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05/03/2001
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Publication #:
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Pub Dt:
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01/10/2002
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Title:
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CMP POLISHING SLURRY DEWATERING AND RECONSTITUTION
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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09848894
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Filing Dt:
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05/04/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09859147
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Filing Dt:
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05/16/2001
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Publication #:
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Pub Dt:
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09/27/2001
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Title:
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COMPOSITION AND METHOD FOR POLISHING IN METAL CMP
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Patent #:
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Issue Dt:
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10/14/2003
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Application #:
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09860933
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Filing Dt:
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05/18/2001
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Publication #:
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Pub Dt:
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02/13/2003
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITIONS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09862221
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Filing Dt:
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05/22/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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ELIMINATING AIR POCKETS UNDER A POLISHING PAD
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Patent #:
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Issue Dt:
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07/30/2002
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Application #:
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09862734
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Filing Dt:
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05/22/2001
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Title:
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POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09882453
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Filing Dt:
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06/15/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Title:
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COMPOSITION AND METHOD FOR POLISHING SEMICONDUCTORS
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09896588
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Filing Dt:
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06/29/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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BASE-PAD FOR A POLISHING PAD
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09916130
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Filing Dt:
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07/26/2001
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Publication #:
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Pub Dt:
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01/30/2003
| | | | |
Title:
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SEMICONDUCTOR WAFER WITH A RESISTANT FILM
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09925209
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Filing Dt:
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08/09/2001
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Publication #:
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Pub Dt:
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05/16/2002
| | | | |
Title:
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CHEMICAL MECHANICAL PLANARIZATION OF METAL SUBSTRATES
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09933190
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Filing Dt:
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08/20/2001
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Publication #:
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Pub Dt:
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02/28/2002
| | | | |
Title:
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SUBSTRATE SUPPORTING CARRIER PAD
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10005253
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Filing Dt:
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12/04/2001
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Publication #:
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Pub Dt:
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09/19/2002
| | | | |
Title:
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POLISHING OF SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10005268
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Filing Dt:
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12/04/2001
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Publication #:
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Pub Dt:
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06/27/2002
| | | | |
Title:
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POLISHING PAD INSTALLATION TOOL
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10011358
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Filing Dt:
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11/06/2001
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Publication #:
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Pub Dt:
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05/08/2003
| | | | |
Title:
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METHOD OF FABRICATING A POLISHING PAD HAVING AN OPTICAL WINDOW
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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10043664
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Filing Dt:
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10/26/2001
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Publication #:
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Pub Dt:
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08/08/2002
| | | | |
Title:
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POLISHING OF METAL SUBSTRATES
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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10061783
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Filing Dt:
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02/01/2002
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Publication #:
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Pub Dt:
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07/25/2002
| | | | |
Title:
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APPARATUS AND METHODS FOR CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10068213
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Filing Dt:
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02/06/2002
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Publication #:
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Pub Dt:
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07/04/2002
| | | | |
Title:
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POLISHING OF SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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10071668
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Filing Dt:
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02/08/2002
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Publication #:
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Pub Dt:
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07/25/2002
| | | | |
Title:
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POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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10081706
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Filing Dt:
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02/21/2002
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Publication #:
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Pub Dt:
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09/12/2002
| | | | |
Title:
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CMP POLISHING SLURRY DEWATERING AND RECONSTITUTION
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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10081707
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Filing Dt:
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02/21/2002
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Publication #:
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Pub Dt:
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08/21/2003
| | | | |
Title:
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POLISHING COMPOSITION
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10109813
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Filing Dt:
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03/29/2002
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Publication #:
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Pub Dt:
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10/02/2003
| | | | |
Title:
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INTERCHANGEABLE CONDITIONING DISK APPARATUS
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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10121887
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Filing Dt:
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04/12/2002
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Publication #:
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Pub Dt:
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12/19/2002
| | | | |
Title:
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POLISHING COMPOSITION HAVING A SURFACTANT
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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10137056
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Filing Dt:
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05/01/2002
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Publication #:
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Pub Dt:
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10/24/2002
| | | | |
Title:
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POLISHING PADS AND METHODS RELATING THERETO
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|
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Patent #:
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|
Issue Dt:
|
09/16/2003
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Application #:
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10192057
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Filing Dt:
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07/10/2002
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Publication #:
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Pub Dt:
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12/19/2002
| | | | |
Title:
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STACKED POLISHING PAD HAVING SEALED EDGE
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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10193429
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
|
02/06/2003
| | | | |
Title:
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POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
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NONE
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Issue Dt:
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|
Application #:
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10305572
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Filing Dt:
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11/27/2002
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Publication #:
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Pub Dt:
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07/24/2003
| | | | |
Title:
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Planarization of silicon carbide hardmask material
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10331012
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Filing Dt:
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12/27/2002
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Publication #:
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Pub Dt:
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07/01/2004
| | | | |
Title:
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PERFORATED-TRANSPARENT POLISHING PAD
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Patent #:
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|
Issue Dt:
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11/27/2007
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Application #:
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10349792
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Filing Dt:
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01/23/2003
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Publication #:
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Pub Dt:
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07/29/2004
| | | | |
Title:
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SELECTIVE BARRIER METAL POLISHING SOLUTION
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Patent #:
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|
Issue Dt:
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11/07/2006
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Application #:
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10350859
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Filing Dt:
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01/24/2003
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Publication #:
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Pub Dt:
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07/24/2003
| | | | |
Title:
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TUNGSTEN POLISHING SOLUTION
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10357024
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Filing Dt:
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02/03/2003
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Title:
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ANTI-SCATTERING LAYER FOR POLISHING PAD WINDOWS
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10373513
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Filing Dt:
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02/25/2003
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Publication #:
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Pub Dt:
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08/26/2004
| | | | |
Title:
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POLISHING PAD APPARATUS AND METHODS
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Patent #:
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|
Issue Dt:
|
07/12/2005
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Application #:
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10376059
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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09/02/2004
| | | | |
Title:
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MODULAR BARRIER REMOVAL POLISHING SLURRY
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Patent #:
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|
Issue Dt:
|
01/18/2005
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Application #:
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10393070
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Filing Dt:
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03/20/2003
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Publication #:
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|
Pub Dt:
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09/23/2004
| | | | |
Title:
|
METHOD OF REDUCING DEFECTIVITY DURING CHEMICAL MECHANICAL PLANARIZATION
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|
|
Patent #:
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|
Issue Dt:
|
03/02/2004
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Application #:
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10393074
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Filing Dt:
|
03/20/2003
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Publication #:
|
|
Pub Dt:
|
09/25/2003
| | | | |
Title:
|
COMPOSITION AND METHOD FOR POLISHING IN METAL CMP
|
|
|
Patent #:
|
|
Issue Dt:
|
02/17/2009
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Application #:
|
10396013
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Filing Dt:
|
03/25/2003
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Publication #:
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|
Pub Dt:
|
09/25/2003
| | | | |
Title:
|
TANTALUM BARRIER REMOVAL SOLUTION
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|
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Patent #:
|
|
Issue Dt:
|
08/30/2005
|
Application #:
|
10402168
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Filing Dt:
|
03/28/2003
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Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
Title:
|
METHOD FOR PLANARIZING METAL INTERCONNECTS
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10405542
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Filing Dt:
|
04/02/2003
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Publication #:
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|
Pub Dt:
|
10/09/2003
| | | | |
Title:
|
Composite conditioning tool
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|
|
Patent #:
|
|
Issue Dt:
|
05/17/2005
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Application #:
|
10421106
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Filing Dt:
|
04/23/2003
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Publication #:
|
|
Pub Dt:
|
10/28/2004
| | | | |
Title:
|
CONDUCTIVE POLISHING PAD WITH ANODE AND CATHODE
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|
|
Patent #:
|
|
Issue Dt:
|
05/31/2005
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Application #:
|
10630255
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Filing Dt:
|
07/30/2003
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Publication #:
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Pub Dt:
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02/03/2005
| | | | |
Title:
|
POROUS POLYURETHANE POLISHING PADS
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|
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Patent #:
|
|
Issue Dt:
|
03/28/2006
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Application #:
|
10634437
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Filing Dt:
|
08/05/2003
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Publication #:
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|
Pub Dt:
|
02/10/2005
| | | | |
Title:
|
COMPOSITION FOR POLISHING SEMICONDUCTOR LAYERS
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|
|
Patent #:
|
|
Issue Dt:
|
11/27/2007
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Application #:
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10634964
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Filing Dt:
|
08/05/2003
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Publication #:
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|
Pub Dt:
|
02/10/2005
| | | | |
Title:
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CHEMICAL MECHANICAL PLANARIZATION COMPOSITIONS FOR REDUCING EROSION IN SEMICONDUCTOR WAFERS
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|
|
Patent #:
|
|
Issue Dt:
|
01/17/2006
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Application #:
|
10652173
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Filing Dt:
|
08/29/2003
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Publication #:
|
|
Pub Dt:
|
03/03/2005
| | | | |
Title:
|
SYSTEM AND METHOD FOR CHARACTERIZING A TEXTURED SURFACE
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|
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Patent #:
|
|
Issue Dt:
|
02/01/2005
|
Application #:
|
10652175
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Filing Dt:
|
08/29/2003
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Title:
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POLISHING PAD FOR ELECTROCHEMICAL MECHANICAL POLISHING
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10652176
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Filing Dt:
|
08/29/2003
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Publication #:
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|
Pub Dt:
|
03/03/2005
| | | | |
Title:
|
Particle-free polishing fluid for nickel-based coating planarization
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
|
10652177
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Filing Dt:
|
08/29/2003
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Publication #:
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Pub Dt:
|
11/25/2004
| | | | |
Title:
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Multi-oxidizer-based slurry for nickel hard disk planarization
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Patent #:
|
|
Issue Dt:
|
03/22/2005
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Application #:
|
10659889
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Filing Dt:
|
09/11/2003
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Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
Title:
|
POLISHING PADS AND METHODS RELATING THERETO
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10664722
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Filing Dt:
|
09/17/2003
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Publication #:
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|
Pub Dt:
|
03/17/2005
| | | | |
Title:
|
Polishing composition for semiconductor wafers
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|
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Patent #:
|
|
Issue Dt:
|
11/27/2007
|
Application #:
|
10670534
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Filing Dt:
|
09/25/2003
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Publication #:
|
|
Pub Dt:
|
03/31/2005
| | | | |
Title:
|
HIGH-RATE BARRIER POLISHING COMPOSITION
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|
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Patent #:
|
|
Issue Dt:
|
07/10/2007
|
Application #:
|
10670587
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Filing Dt:
|
09/25/2003
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Publication #:
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|
Pub Dt:
|
03/31/2005
| | | | |
Title:
|
BARRIER POLISHING FLUID
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|
|
Patent #:
|
|
Issue Dt:
|
09/05/2006
|
Application #:
|
10673002
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Filing Dt:
|
09/26/2003
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Publication #:
|
|
Pub Dt:
|
03/31/2005
| | | | |
Title:
|
RESILIENT POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10692093
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Filing Dt:
|
10/22/2003
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Publication #:
|
|
Pub Dt:
|
04/28/2005
| | | | |
Title:
|
Method of second step polishing in copper CMP with a polishing fluid containing no oxidizing agent
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10704058
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Filing Dt:
|
11/06/2003
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Publication #:
|
|
Pub Dt:
|
05/12/2005
| | | | |
Title:
|
Compositions and methods for a barrier removal
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/2006
|
Application #:
|
10712186
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Filing Dt:
|
11/13/2003
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Publication #:
|
|
Pub Dt:
|
05/19/2005
| | | | |
Title:
|
POLISHING PAD HAVING SLURRY UTILIZATION ENHANCING GROOVES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/24/2006
|
Application #:
|
10712362
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Filing Dt:
|
11/13/2003
|
Publication #:
|
|
Pub Dt:
|
05/19/2005
| | | | |
Title:
|
POLISHING PAD HAVING A GROOVE ARRANGEMENT FOR REDUCING SLURRY CONSUMPTION
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10712446
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Filing Dt:
|
11/13/2003
|
Publication #:
|
|
Pub Dt:
|
05/19/2005
| | | | |
Title:
|
Compositions and methods for polishing copper
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10722736
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Filing Dt:
|
11/26/2003
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Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
Title:
|
Compositions and methods for chemical mechanical polishing silica and silicon nitride
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|
|
Patent #:
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|
Issue Dt:
|
01/10/2006
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Application #:
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10722739
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Filing Dt:
|
11/25/2003
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Publication #:
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Pub Dt:
|
05/26/2005
| | | | |
Title:
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POLISHING PAD WITH HIGH OPTICAL TRANSMISSION WINDOW
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10734795
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Filing Dt:
|
12/11/2003
|
Title:
|
CHEMICAL MECHANICAL POLISHING PAD HAVING A PROCESS-DEPENDENT GROOVE CONFIGURATION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10734945
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Filing Dt:
|
12/11/2003
|
Title:
|
CHEMICAL MECHANICAL POLISHING METHOD FOR REDUCING SLURRY REFLUX
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10741370
|
Filing Dt:
|
12/19/2003
|
Publication #:
|
|
Pub Dt:
|
06/23/2005
| | | | |
Title:
|
Compositions and methods for controlled polishing of copper
|
|