Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 014373/0686 | |
| Pages: | 3 |
| | Recorded: | 08/15/2003 | | |
Conveyance: | RELEASE |
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Total properties:
3
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Patent #:
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Issue Dt:
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11/20/1990
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Application #:
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07494173
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Filing Dt:
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03/14/1990
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Title:
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TEMPERATURE CONTROLLED CHUCK FOR ELEVATED TEMPERATURE ETCH PROCESSING
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Patent #:
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Issue Dt:
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05/14/1991
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Application #:
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07566860
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Filing Dt:
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08/10/1990
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Title:
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METHOD OF PLASMA ETCHING WITH PARALLEL PLATE REACTOR HAVING A GRID
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Patent #:
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Issue Dt:
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05/11/1993
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Application #:
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07643197
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Filing Dt:
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01/18/1991
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Title:
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PARALLEL PLATE REACTOR AND METHOD OF USE
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Assignee
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4050 LAKESIDE DR |
RICHMOND, CALIFORNIA 94806 |
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Correspondence name and address
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SILICON VALLEY BANK
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BRYAN BRITTINGHAM
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LOAN DOCUMENTATION HA155
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3003 TASMAN DR.
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SANTA CLARA, CA 95054
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