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Reel/Frame:026046/0690   Pages: 5
Recorded: 03/30/2011
Attorney Dkt #:17979-0054003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
7961294
Issue Dt:
06/14/2011
Application #:
12247597
Filing Dt:
10/08/2008
Publication #:
US20090040487
Pub Dt:
02/12/2009
Title:
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
Assignors
1
HUMMEL, WOLFGANG
Exec Dt:
06/18/2004
2
FISCHER, JUERGEN
Exec Dt:
06/24/2004
3
AUBELE, KARL-EUGEN
Exec Dt:
06/18/2004
4
MERZ, ERICH
Exec Dt:
06/23/2004
5
REINER, RAOUL
Exec Dt:
06/24/2004
6
RIEF, KLAUS
Exec Dt:
06/25/2004
7
SCHOENGART, STEFAN
Exec Dt:
06/17/2004
8
NEUMAIER, MARKUS
Exec Dt:
06/22/2004
9
TROSSBACH, BAERBEL
Exec Dt:
06/22/2004
10
WEBER, ULRICH
Exec Dt:
06/18/2004
11
MUEHLBEYER, MICHAEL
Exec Dt:
07/07/2004
12
HOLDERER, HUBERT
Exec Dt:
06/22/2004
13
KOHL, ALEXANDER
Exec Dt:
06/18/2004
14
WEBER, JOCHEN
Exec Dt:
06/25/2004
15
LIPPERT, JOHANNES
Exec Dt:
06/23/2004
16
RASSEL, THORSTEN
Exec Dt:
06/22/2004
Assignee
1
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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