Patent Assignment Details
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Reel/Frame: | 060028/0692 | |
| Pages: | 5 |
| | Recorded: | 05/26/2022 | | |
Attorney Dkt #: | 081468-0569055 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17778054
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Filing Dt:
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05/19/2022
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Publication #:
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Pub Dt:
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01/05/2023
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Title:
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METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, METHOD OF USE
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Assignee
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P.O. BOX 324 |
VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW PITTMAN LLP
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PO BOX 10500
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MCLEAN, VA 22102
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09/26/2024 08:53 AM
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