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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:048844/0693   Pages: 9
Recorded: 04/10/2019
Attorney Dkt #:100100.010001
Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 29
1
Patent #:
Issue Dt:
04/20/2004
Application #:
09629073
Filing Dt:
07/31/2000
Title:
METHOD AND APPARATUS FOR FAULT DETECTION OF A PROCESSING TOOL AND CONTROL THEREOF USING AN ADVANCED PROCESS CONTROL (APC) FRAMEWORK
2
Patent #:
Issue Dt:
02/26/2002
Application #:
09665646
Filing Dt:
09/19/2000
Title:
Mask identification database server
3
Patent #:
Issue Dt:
12/16/2003
Application #:
09829195
Filing Dt:
04/09/2001
Title:
DEFECT DETECTION IN PELLICIZED RETICLES VIA EXPOSURE AT SHORT WAVELENGTHS
4
Patent #:
Issue Dt:
10/01/2002
Application #:
09894546
Filing Dt:
06/28/2001
Title:
METHOD AND APPARATUS FOR CONTROLLING PHOTOLITHOGRAPHY OVERLAY REGISTRATION
5
Patent #:
Issue Dt:
01/09/2007
Application #:
10010412
Filing Dt:
12/07/2001
Title:
MASK IDENTIFICATION DATABASE SERVER
6
Patent #:
Issue Dt:
12/09/2003
Application #:
10010463
Filing Dt:
11/08/2001
Title:
ADJUSTABLE WAFER STAGE, AND A METHOD AND SYSTEM FOR PERFORMING PROCESS OPERATIONS USING SAME
7
Patent #:
Issue Dt:
05/18/2004
Application #:
10022488
Filing Dt:
12/17/2001
Title:
METHOD AND APPARATUS FOR CONTROLLING PHOTOLITHOGRAPHY OVERLAY REGISTRATION INCORPORATING FEEDFORWARD OVERLAY INFORMATION
8
Patent #:
Issue Dt:
04/29/2003
Application #:
10044247
Filing Dt:
01/11/2002
Title:
SOI DEVICE WITH METAL SOURCE/DRAIN AND METHOD OF FABRICATION
9
Patent #:
Issue Dt:
06/14/2005
Application #:
10135145
Filing Dt:
04/30/2002
Publication #:
Pub Dt:
12/02/2004
Title:
AGENT REACTIVE SCHEDULING IN AN AUTOMATED MANUFACTURING ENVIRONMENT
10
Patent #:
Issue Dt:
08/02/2005
Application #:
10223174
Filing Dt:
08/19/2002
Title:
PROCESS CONTROL BASED ON AN ESTIMATED PROCESS RESULT
11
Patent #:
Issue Dt:
08/25/2009
Application #:
10323529
Filing Dt:
12/18/2002
Title:
INITIATING TEST RUNS BASED ON FAULT DETECTION RESULTS
12
Patent #:
Issue Dt:
07/18/2006
Application #:
10379738
Filing Dt:
03/05/2003
Title:
CONCURRENT MEASUREMENT OF CRITICAL DIMENSION AND OVERLAY IN SEMICONDUCTOR MANUFACTURING
13
Patent #:
Issue Dt:
12/28/2004
Application #:
10427620
Filing Dt:
05/01/2003
Title:
METHOD AND APPARATUS FOR FILTERING METROLOGY DATA BASED ON COLLECTION PURPOSE
14
Patent #:
Issue Dt:
02/28/2006
Application #:
10615086
Filing Dt:
07/07/2003
Publication #:
Pub Dt:
01/13/2005
Title:
ULTRA-UNIFORM SILICIDES IN INTEGRATED CIRCUIT TECHNOLOGY
15
Patent #:
Issue Dt:
07/05/2005
Application #:
10674400
Filing Dt:
10/01/2003
Title:
MERGED FINFET P-CHANNEL/N-CHANNEL PAIR
16
Patent #:
Issue Dt:
05/24/2005
Application #:
10778411
Filing Dt:
02/13/2004
Publication #:
Pub Dt:
08/19/2004
Title:
METHOD AND APPARATUS FOR CONTROLLING PHOTOLITHOGRAPHY OVERLAY REGISTRATION INCORPORATING FEEDFORWARD OVERLAY INFORMATION
17
Patent #:
Issue Dt:
02/23/2010
Application #:
11053935
Filing Dt:
02/10/2005
Title:
METHOD FOR FORMING SEMICONDUCTOR DEVICES WITH ACTIVE SILICON HEIGHT VARIATION
18
Patent #:
Issue Dt:
07/27/2010
Application #:
11145905
Filing Dt:
06/06/2005
Publication #:
Pub Dt:
05/04/2006
Title:
TECHNIQUE FOR FORMING A DIELECTRIC ETCH STOP LAYER ABOVE A STRUCTURE INCLUDING CLOSELY SPACED LINES
19
Patent #:
Issue Dt:
11/22/2005
Application #:
11151098
Filing Dt:
06/13/2005
Publication #:
Pub Dt:
11/17/2005
Title:
AGENT REACTIVE SCHEDULING IN AN AUTOMATED MANUFACTURING ENVIRONMENT
20
Patent #:
Issue Dt:
12/11/2007
Application #:
11252493
Filing Dt:
10/17/2005
Publication #:
Pub Dt:
11/30/2006
Title:
ULTRA-UNIFORM SILICIDE SYSTEM IN INTEGRATED CIRCUIT TECHNOLOGY
21
Patent #:
Issue Dt:
06/09/2009
Application #:
11535327
Filing Dt:
09/26/2006
Publication #:
Pub Dt:
07/05/2007
Title:
AUTOMATED STATE ESTIMATION SYSTEM FOR CLUSTER TOOLS AND A METHOD OF OPERATING THE SAME
22
Patent #:
Issue Dt:
12/08/2009
Application #:
11684211
Filing Dt:
03/09/2007
Publication #:
Pub Dt:
01/31/2008
Title:
FIELD EFFECT TRANSISTOR AND METHOD OF FORMING A FIELD EFFECT TRANSISTOR
23
Patent #:
Issue Dt:
04/26/2011
Application #:
11693215
Filing Dt:
03/29/2007
Publication #:
Pub Dt:
03/06/2008
Title:
FIELD EFFECT TRANSISTOR HAVING A STRESSED CONTACT ETCH STOP LAYER WITH REDUCED CONFORMALITY
24
Patent #:
Issue Dt:
11/09/2010
Application #:
11875535
Filing Dt:
10/19/2007
Publication #:
Pub Dt:
10/02/2008
Title:
METHOD AND SEMICONDUCTOR STRUCTURE FOR MONITORING ETCH CHARACTERISTICS DURING FABRICATION OF VIAS OF INTERCONNECT STRUCTURES
25
Patent #:
Issue Dt:
08/23/2011
Application #:
12691477
Filing Dt:
01/21/2010
Publication #:
Pub Dt:
06/17/2010
Title:
METHOD FOR FORMING SEMICONDUCTOR DEVICES WITH ACTIVE SILICON HEIGHT VARIATION
26
Patent #:
Issue Dt:
02/14/2012
Application #:
12894414
Filing Dt:
09/30/2010
Publication #:
Pub Dt:
01/27/2011
Title:
METHOD AND SEMICONDUCTOR STRUCTURE FOR MONITORING ETCH CHARACTERISTICS DURING FABRICATION OF VIAS OF INTERCONNECT STRUCTURES
27
Patent #:
Issue Dt:
09/11/2012
Application #:
13184050
Filing Dt:
07/15/2011
Publication #:
Pub Dt:
11/10/2011
Title:
METHOD FOR FORMING SEMICONDUCTOR DEVICES WITH ACTIVE SILICON HEIGHT VARIATION
28
Patent #:
Issue Dt:
07/30/2013
Application #:
13607023
Filing Dt:
09/07/2012
Publication #:
Pub Dt:
12/27/2012
Title:
SEMICONDUCTOR DEVICES WITH ACTIVE SEMICONDUCTOR HEIGHT VARIATION
29
Patent #:
NONE
Issue Dt:
Application #:
13913144
Filing Dt:
06/07/2013
Publication #:
Pub Dt:
10/17/2013
Title:
METHOD FOR FORMING SEMICONDUCTOR DEVICES WITH ACTIVE SILICON HEIGHT VARIATION
Assignor
1
Exec Dt:
03/15/2019
Assignee
1
121 W. LONG LAKE ROAD
SUITE 300
BLOOMFIELD HILLS, MICHIGAN 48304
Correspondence name and address
CHRISTOPHER J. RECKAMP
311 S. WACKER DRIVE
FAEGRE BAKER DANIELS LLP
CHICAGO, IL 60606

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