Patent Assignment Details
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| Reel/Frame: | 011017/0696 | |
| Pages: | 3 |
| | Recorded: | 07/31/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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09629073
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Filing Dt:
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07/31/2000
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Title:
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METHOD AND APPARATUS FOR FAULT DETECTION OF A PROCESSING TOOL AND CONTROL THEREOF USING AN ADVANCED PROCESS CONTROL (APC) FRAMEWORK
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Assignee
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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Correspondence name and address
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WILLIAMS, MORGAN & AMERSON, P.C.
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GEORGE J. OEHLING, PATENT AGENT
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7676 HILLMONT, SUITE 250
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HOUSTON, TEXAS 77040
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