Patent Assignment Details
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| Reel/Frame: | 021329/0696 | |
| Pages: | 3 |
| | Recorded: | 08/01/2008 | | |
| Attorney Dkt #: | EP-156 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/19/2012
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Application #:
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12184517
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Filing Dt:
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08/01/2008
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Publication #:
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Pub Dt:
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02/04/2010
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Title:
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METHOD FOR SELECTIVELY ETCHING AREAS OF A SUBSTRATE USING A GAS CLUSTER ION BEAM
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Assignee
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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KRISTI L. DAVIDSON
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441 VINE STREET
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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