Total properties:
27
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Patent #:
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Issue Dt:
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Application #:
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05942268
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Filing Dt:
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Title:
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Patent #:
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Issue Dt:
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08/19/1980
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Application #:
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05942608
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Filing Dt:
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09/15/1978
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Title:
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CONVEYOR SYSTEM
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Patent #:
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Issue Dt:
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10/14/1980
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Application #:
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06029525
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Filing Dt:
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04/12/1979
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Title:
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METHOD AND APPARATUS FOR REMOVAL OF BY-PRODUCTS OF CHEMICAL VAPOR DEPOSITION FROM OIL FOR VACUUM PUMP
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Patent #:
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Issue Dt:
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02/02/1982
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Application #:
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06145867
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Filing Dt:
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05/01/1980
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Title:
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METHOD AND APPARATUS FOR DRYING WAFERS
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Patent #:
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Issue Dt:
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04/21/1987
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Application #:
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06193876
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Filing Dt:
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10/03/1980
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Title:
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MASS FLOW CONTROLLER
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Patent #:
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Issue Dt:
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10/08/1985
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Application #:
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06412237
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Filing Dt:
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08/27/1982
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Title:
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CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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03/26/1985
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Application #:
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06479197
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Filing Dt:
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03/28/1983
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Title:
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WAFER HANDLING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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09/10/1985
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Application #:
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06528193
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Filing Dt:
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08/31/1983
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Title:
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CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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06/25/1985
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Application #:
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06529415
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Filing Dt:
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09/06/1983
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Title:
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SUBSTRATE LOADING MEANS FOR A CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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04/15/1986
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Application #:
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06607065
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Filing Dt:
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05/04/1984
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Title:
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CHEMICAL VAPOR DEPOSITION WAFER BOAT
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Patent #:
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Issue Dt:
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10/22/1985
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Application #:
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06628542
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Filing Dt:
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07/06/1984
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Title:
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CHEMICAL VAPOR DEPOSITION WAFER BOAT
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Patent #:
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Issue Dt:
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10/15/1985
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Application #:
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06657313
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Filing Dt:
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10/02/1984
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Title:
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HEMICAL VAPOR DEPOSITION PROCESS
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Patent #:
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|
Issue Dt:
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01/13/1987
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Application #:
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06719409
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Filing Dt:
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04/03/1985
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Title:
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METHOD OF LOADING AND UNLOADING A FURNACE
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Patent #:
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Issue Dt:
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02/10/1987
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Application #:
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06804954
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Filing Dt:
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12/05/1985
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Title:
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CHEMICAL VAPOR DEPOSITION WAFER BOAT
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Patent #:
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|
Issue Dt:
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03/01/1988
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Application #:
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06845212
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Filing Dt:
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03/27/1986
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Title:
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PULSEWIDTH MODULATED PRESSURE CONTROL SYSTEM FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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03/01/1988
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Application #:
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06863963
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Filing Dt:
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05/16/1986
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Title:
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WAFER BOAT TRANSFER TOOL
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Patent #:
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|
Issue Dt:
|
09/13/1988
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Application #:
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06864077
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Filing Dt:
|
05/16/1986
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Title:
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METHOD AND APPARATUS FOR TRANSFERRING WAFERS BETWEEN CASSETTES AND A BOAT
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|
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Patent #:
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|
Issue Dt:
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10/20/1987
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Application #:
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06864078
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Filing Dt:
|
05/16/1986
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Title:
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BALANCE MECHANISM FOR MOVABLE JAW CHUCK OF A SPIN STATION
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|
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Patent #:
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|
Issue Dt:
|
12/08/1987
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Application #:
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06864676
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Filing Dt:
|
05/19/1986
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Title:
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DIFFUSION FURNACE MULTIZONE TEMPERATURE CONTROL
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|
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Patent #:
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|
Issue Dt:
|
09/08/1987
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Application #:
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06880422
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Filing Dt:
|
06/30/1986
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Title:
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SEMICONDUCTOR WAFER FURNACE DOOR
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Patent #:
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Issue Dt:
|
08/04/1987
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Application #:
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06880423
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Filing Dt:
|
06/30/1986
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Title:
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SEMICONDUCTOR WAFER BOAT LOADER CONTROL SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
01/26/1988
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Application #:
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06880460
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Filing Dt:
|
06/30/1986
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Title:
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SEMICONDUCTOR WAFER BOAT LOADER RELEASABLE MOUNTING
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|
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Patent #:
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|
Issue Dt:
|
01/19/1988
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Application #:
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06899923
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Filing Dt:
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08/25/1986
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Title:
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LOW TEMPERATURE SILICON NITRIDE CVD PROCESS
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|
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Patent #:
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|
Issue Dt:
|
12/08/1987
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Application #:
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06919736
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Filing Dt:
|
10/16/1986
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Title:
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GAS SCAVENGER
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|
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Patent #:
|
|
Issue Dt:
|
01/26/1988
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Application #:
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07048868
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Filing Dt:
|
05/12/1987
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Title:
|
WAFER TRANSFER STAND
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|
|
Patent #:
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|
Issue Dt:
|
12/12/1989
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Application #:
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07181787
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Filing Dt:
|
04/15/1988
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Title:
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HOT WALL DIFFUSION FURNACE AND METHOD FOR OPERATING THE FURNACE
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Patent #:
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|
Issue Dt:
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06/14/1994
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Application #:
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07691470
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Filing Dt:
|
04/25/1991
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Title:
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PRIMARY FLOW CVD APPARATUS COMPRISING GAS PREHEATER AND MEANS FOR SUBSTANTIALLY EDDY-FREE GAS FLOW
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