Patent Assignment Details
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Reel/Frame: | 009346/0698 | |
| Pages: | 5 |
| | Recorded: | 07/27/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09037586
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Filing Dt:
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03/09/1998
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Title:
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METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR SUBSTRATES AFTER POLISHING OF COPPER FILM
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Assignee
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1010 RINCON CIRCLE |
SAN JOSE, CALIFORNIA 95131 |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP
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MICHAEL J. MALLIE
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12400 WILSHIRE BLVD.
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LOS ANGELES, CA 90025
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