Patent Assignment Details
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Reel/Frame: | 019102/0703 | |
| Pages: | 6 |
| | Recorded: | 03/16/2007 | | |
Attorney Dkt #: | 6601P010C |
Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT A INCORRECT SERIAL NUMBER 10/031785. AND TO CORRECT THE NUMBER OF PAGES ON MICROFILM PAGES FROM 12 TO 6 PREVIOUSLY RECORDED ON REEL 014724 FRAME 0721. ASSIGNMENT OF ASSIGNOR'S INTEREST |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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10013785
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Filing Dt:
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12/11/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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METHOD FOR TWO DIMENSIONAL ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
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Assignee
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5503 LA VELDHOVEN |
DE RUN 1110 |
NETHERLANDS |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP
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12400 WILSHIRE BOULEVARD, 7TH FLOOR
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LOS ANGELES, CALIFORNIA 90025
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