Patent Assignment Details
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| Reel/Frame: | 013354/0706 | |
| Pages: | 2 |
| | Recorded: | 08/21/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10204322
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Filing Dt:
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08/21/2002
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Publication #:
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Pub Dt:
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01/16/2003
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Title:
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GAS LEAKAGE DETECTION SYSTEM, GAS LEAKAGE DETECTION METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignees
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| 1-25 MINAMI KAMATA 1-CHOME |
| OHTA-KU TOKYO 144-8505, JAPAN |
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Correspondence name and address
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PILLSBURY WINTHROP LLP
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GLENN J. PERRY
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P.O. BOX 10500
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MCLEAN, VA 22102
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