Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 014724/0721 | |
| Pages: | 12 |
| | Recorded: | 11/25/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
4
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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09521026
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Filing Dt:
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03/07/2000
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Title:
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RECIPE CASCADING IN A WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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09602527
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Filing Dt:
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06/23/2000
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Title:
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ROBOT PRE-POSITIONING IN A WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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06/08/2004
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Application #:
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09624712
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Filing Dt:
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07/25/2000
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Title:
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METHOD FOR AN IMPROVED DEVELOPING PROCESS IN WAFER PHOTOLITHOGRAPHY
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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10013785
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Filing Dt:
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12/11/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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METHOD FOR TWO DIMENSIONAL ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
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Assignee
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| DE RUN 1110 |
| 5503 LA VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR, ET AL.
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MICHAEL A. BERNADICOU
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12400 WILSHIRE BLVD., 7TH FLOOR
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LOS ANGELES, CA 90025
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