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Reel/Frame:	022835/0730			Pages:	42
		Recorded:	06/18/2009
Attorney Dkt #:	11000054-0119
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 77

Patent #:	5118078	Issue Dt:	06/02/1992	Application #:	07701200	Filing Dt:	05/16/1991
Title:	BUTTERFLY VALVE HAVING IMPROVED SEALING CHARACTERISTICS

Patent #:	5218991	Issue Dt:	06/15/1993	Application #:	07872350	Filing Dt:	04/23/1992
Title:	REGULATOR FLOW CONTROL

Patent #:	5191793	Issue Dt:	03/09/1993	Application #:	07912007	Filing Dt:	07/10/1992
Title:	FLUID MASS FLOW METER DEVICE WITH REDUCED ATTITUDE SENSITIVITY

Patent #:	5413139	Issue Dt:	05/09/1995	Application #:	08078365	Filing Dt:	06/16/1993
Title:	THROTTLE VALVE

Patent #:	5396803	Issue Dt:	03/14/1995	Application #:	08088317	Filing Dt:	07/07/1993
Title:	DUAL BALANCED CAPACITANCE MANOMETERS FOR SUPPRESSING VIBRATION EFFECTS

Patent #:	5803507	Issue Dt:	09/08/1998	Application #:	08557378	Filing Dt:	11/13/1995
Title:	APPARATUS FOR HANDLING PROCESS FLUID

Patent #:	5785297	Issue Dt:	07/28/1998	Application #:	08682170	Filing Dt:	07/16/1996
Title:	VALVE MECHANISM

Patent #:	5850850	Issue Dt:	12/22/1998	Application #:	08685260	Filing Dt:	07/23/1996
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

Patent #:	5765283	Issue Dt:	06/16/1998	Application #:	08685322	Filing Dt:	07/23/1996
Title:	METHOD OF MAKING A FLOW CONTROLLER

Patent #:	5763774	Issue Dt:	06/09/1998	Application #:	08691061	Filing Dt:	08/01/1996
Title:	FLUID FLOW METER WITH REDUCED ORIENTATION SENSITIVITY

Patent #:	6044701	Issue Dt:	04/04/2000	Application #:	08815323	Filing Dt:	03/10/1997
Title:	THERMAL MASS FLOW CONTROLLER HAVING ORTHOGONAL THERMAL MASS FLOW SENSOR

Patent #:	5901741	Issue Dt:	05/11/1999	Application #:	08860343	Filing Dt:	10/02/1997
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

Patent #:	6078030	Issue Dt:	06/20/2000	Application #:	09150458	Filing Dt:	09/09/1998
Title:	COMPONENT HEATER FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

Patent #:	6319743	Issue Dt:	11/20/2001	Application #:	09291468	Filing Dt:	04/14/1999
Title:	METHOD OF MAKING THIN FILM PIEZORESISTIVE SENSOR

Patent #:	6343617	Issue Dt:	02/05/2002	Application #:	09350744	Filing Dt:	07/09/1999
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Patent #:	6575027	Issue Dt:	06/10/2003	Application #:	09350746	Filing Dt:	07/09/1999
Title:	MASS FLOW SENSOR INTERFACE CIRCUIT

Patent #:	6449571	Issue Dt:	09/10/2002	Application #:	09350747	Filing Dt:	07/09/1999
Title:	SYSTEM AND METHOD FOR SENSOR RESPONSE LINEARIZATION

Patent #:	6445980	Issue Dt:	09/03/2002	Application #:	09351098	Filing Dt:	07/10/1999
Title:	SYSTEM AND METHOD FOR A VARIABLE GAIN PROPORTIONAL-INTEGRAL (PI) CONTROLLER

Patent #:	6404612	Issue Dt:	06/11/2002	Application #:	09351111	Filing Dt:	07/10/1999
Title:	METHOD AND SYSTEM FOR DRIVING A SOLENOID

Patent #:	6389364	Issue Dt:	05/14/2002	Application #:	09351120	Filing Dt:	07/10/1999
Title:	SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER

Patent #:	6425281	Issue Dt:	07/30/2002	Application #:	09616819	Filing Dt:	07/12/2000
Title:	PRESSURE INSENSITIVE GAS CONTROL SYSTEM

Patent #:	6539792	Issue Dt:	04/01/2003	Application #:	09783439	Filing Dt:	02/14/2001
Publication #:	US20010052261	Pub Dt:	12/20/2001
Title:	METHOD AND APPARATUS FOR BALANCING RESISTANCE

Patent #:	7460518	Issue Dt:	12/02/2008	Application #:	09944481	Filing Dt:	08/31/2001
Title:	DEVICES, SOFTWARES AND METHODS FOR RULE BASED DETERMINATION OF ATTRIBUTES OF CALLED DEVICE FOR NETWORK TELEPHONE CALL SETUP

Patent #:	7004453	Issue Dt:	02/28/2006	Application #:	09952083	Filing Dt:	09/12/2001
Title:	PENDULUM VALVE WITH A FULL RANGE OF POSITION CONTROL

Patent #:	6681787	Issue Dt:	01/27/2004	Application #:	10006774	Filing Dt:	12/06/2001
Publication #:	US20020139418	Pub Dt:	10/03/2002
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Patent #:	6714878	Issue Dt:	03/30/2004	Application #:	10062080	Filing Dt:	01/31/2002
Publication #:	US20020114732	Pub Dt:	08/22/2002
Title:	SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER

Patent #:	6910381	Issue Dt:	06/28/2005	Application #:	10063991	Filing Dt:	05/31/2002
Publication #:	US20030221491	Pub Dt:	12/04/2003
Title:	SYSTEM AND METHOD OF OPERATION OF AN EMBEDDED SYSTEM FOR A DIGITAL CAPACITANCE DIAPHRAGM GAUGE

Patent #:	6734659	Issue Dt:	05/11/2004	Application #:	10064136	Filing Dt:	06/13/2002
Title:	ELECTRONIC INTERFACE FOR USE WITH DUAL ELECTRODE CAPACITANCE DIAPHRAGM GAUGES

Patent #:	6701790	Issue Dt:	03/09/2004	Application #:	10064137	Filing Dt:	06/13/2002
Publication #:	US20030231697	Pub Dt:	12/18/2003
Title:	TEMPERATURE REGULATOR FOR USE WITH A PRESSURE SENSING DEVICE

Patent #:	6640822	Issue Dt:	11/04/2003	Application #:	10068052	Filing Dt:	02/05/2002
Publication #:	US20020117202	Pub Dt:	08/29/2002
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Patent #:	6962164	Issue Dt:	11/08/2005	Application #:	10131603	Filing Dt:	04/24/2002
Publication #:	US20020198668	Pub Dt:	12/26/2002
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

Patent #:	6752166	Issue Dt:	06/22/2004	Application #:	10154433	Filing Dt:	05/23/2002
Publication #:	US20020179148	Pub Dt:	12/05/2002
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

Patent #:	7000482	Issue Dt:	02/21/2006	Application #:	10178170	Filing Dt:	06/24/2002
Publication #:	US20030233882	Pub Dt:	12/25/2003
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

Patent #:	7043374	Issue Dt:	05/09/2006	Application #:	10400149	Filing Dt:	03/26/2003
Publication #:	US20040204885	Pub Dt:	10/14/2004
Title:	FLOW SENSOR SIGNAL CONVERSION

Patent #:	7243035	Issue Dt:	07/10/2007	Application #:	10444249	Filing Dt:	05/23/2003
Publication #:	US20040030522	Pub Dt:	02/12/2004
Title:	SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION

Patent #:	6964187	Issue Dt:	11/15/2005	Application #:	10468413	Filing Dt:	08/19/2003
Publication #:	US20040079136	Pub Dt:	04/29/2004
Title:	VACUUM SENSOR

Patent #:	7124647	Issue Dt:	10/24/2006	Application #:	10515328	Filing Dt:	11/22/2004
Publication #:	US20050241412	Pub Dt:	11/03/2005
Title:	SLOTTED FLOW RESTRICTOR FOR A MASS FLOW METER

Patent #:	6845659	Issue Dt:	01/25/2005	Application #:	10622004	Filing Dt:	07/16/2003
Publication #:	US20040100289	Pub Dt:	05/27/2004
Title:	VARIABLE RESISTANCE SENSOR WITH COMMON REFERENCE LEG

Patent #:	7073392	Issue Dt:	07/11/2006	Application #:	10622080	Filing Dt:	07/17/2003
Publication #:	US20040074311	Pub Dt:	04/22/2004
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

Patent #:	6826953	Issue Dt:	12/07/2004	Application #:	10623147	Filing Dt:	07/18/2003
Publication #:	US20040123672	Pub Dt:	07/01/2004
Title:	FLOW SENSOR

Patent #:	7131334	Issue Dt:	11/07/2006	Application #:	10827026	Filing Dt:	04/19/2004
Publication #:	US20050230768	Pub Dt:	10/20/2005
Title:	PRESSURE SENSOR DEVICE AND METHOD

Patent #:	6941965	Issue Dt:	09/13/2005	Application #:	10832949	Filing Dt:	04/27/2004
Publication #:	US20040200529	Pub Dt:	10/14/2004
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

Patent #:	7010983	Issue Dt:	03/14/2006	Application #:	10848739	Filing Dt:	05/19/2004
Publication #:	US20050011271	Pub Dt:	01/20/2005
Title:	METHOD FOR DIGITALLY CONTROLLING A SENSOR SYSTEM

Patent #:	7117104	Issue Dt:	10/03/2006	Application #:	10878974	Filing Dt:	06/28/2004
Publication #:	US20050288873	Pub Dt:	12/29/2005
Title:	ULTRASONIC LIQUID FLOW CONTROLLER

Patent #:	7216019	Issue Dt:	05/08/2007	Application #:	10886836	Filing Dt:	07/08/2004
Publication #:	US20050288825	Pub Dt:	12/29/2005
Title:	METHOD AND SYSTEM FOR A MASS FLOW CONTROLLER WITH REDUCED PRESSURE SENSITIVITY

Patent #:	7133785	Issue Dt:	11/07/2006	Application #:	10887040	Filing Dt:	07/08/2004
Publication #:	US20060009925	Pub Dt:	01/12/2006
Title:	VALVE CONTROL SYSTEM AND METHOD

Patent #:	7222029	Issue Dt:	05/22/2007	Application #:	10887048	Filing Dt:	07/08/2004
Publication #:	US20060009926	Pub Dt:	01/12/2006
Title:	ATTITUDE INSENSITIVE FLOW DEVICE SYSTEM AND METHOD

Patent #:	7412986	Issue Dt:	08/19/2008	Application #:	10887591	Filing Dt:	07/09/2004
Publication #:	US20060005882	Pub Dt:	01/12/2006
Title:	METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER

Patent #:	7113895	Issue Dt:	09/26/2006	Application #:	10926860	Filing Dt:	08/26/2004
Publication #:	US20050023197	Pub Dt:	02/03/2005
Title:	SYSTEM AND METHOD FOR FILTERING OUTPUT IN MASS FLOW CONTROLLERS AND MASS FLOW METERS

Patent #:	7424895	Issue Dt:	09/16/2008	Application #:	10946031	Filing Dt:	09/21/2004
Publication #:	US20060011237	Pub Dt:	01/19/2006
Title:	METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER

Patent #:	7043994	Issue Dt:	05/16/2006	Application #:	10952508	Filing Dt:	09/28/2004
Publication #:	US20050039535	Pub Dt:	02/24/2005
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

Patent #:	7082824	Issue Dt:	08/01/2006	Application #:	10978156	Filing Dt:	10/29/2004
Publication #:	US20050092077	Pub Dt:	05/05/2005
Title:	VARIABLE RESISTANCE SENSOR WITH COMMON REFERENCE LEG

Patent #:	7073388	Issue Dt:	07/11/2006	Application #:	10996023	Filing Dt:	11/23/2004
Publication #:	US20050088270	Pub Dt:	04/28/2005
Title:	VARIABLE CAPACITANCE MEASURING DEVICE COMPRISING A GLASS-CERAMIC INSULATOR

Patent #:	7150201	Issue Dt:	12/19/2006	Application #:	11012750	Filing Dt:	12/15/2004
Publication #:	US20060123920	Pub Dt:	06/15/2006
Title:	SYSTEM AND METHOD FOR MEASURING FLOW

Patent #:	7272512	Issue Dt:	09/18/2007	Application #:	11051209	Filing Dt:	02/04/2005
Publication #:	US20050126306	Pub Dt:	06/16/2005
Title:	FLOW SENSOR SIGNAL CONVERSION

Patent #:	7231931	Issue Dt:	06/19/2007	Application #:	11091824	Filing Dt:	03/28/2005
Publication #:	US20050166968	Pub Dt:	08/04/2005
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

Patent #:	7114511	Issue Dt:	10/03/2006	Application #:	11092144	Filing Dt:	03/29/2005
Publication #:	US20050167627	Pub Dt:	08/04/2005
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

Patent #:	7363182	Issue Dt:	04/22/2008	Application #:	11129166	Filing Dt:	05/13/2005
Publication #:	US20050205774	Pub Dt:	09/22/2005
Title:	SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION

Patent #:	7273063	Issue Dt:	09/25/2007	Application #:	11148053	Filing Dt:	06/08/2005
Publication #:	US20050223813	Pub Dt:	10/13/2005
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

Patent #:	7143774	Issue Dt:	12/05/2006	Application #:	11174753	Filing Dt:	07/05/2005
Publication #:	US20050241698	Pub Dt:	11/03/2005
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

Patent #:	7287434	Issue Dt:	10/30/2007	Application #:	11341826	Filing Dt:	01/27/2006
Publication #:	US20060123921	Pub Dt:	06/15/2006
Title:	SYSTEM AND METHOD FOR MEASURING FLOW

Patent #:	7680399	Issue Dt:	03/16/2010	Application #:	11349068	Filing Dt:	02/07/2006
Publication #:	US20070181703	Pub Dt:	08/09/2007
Title:	SYSTEM AND METHOD FOR PRODUCING AND DELIVERING VAPOR

Patent #:	7409871	Issue Dt:	08/12/2008	Application #:	11377911	Filing Dt:	03/16/2006
Publication #:	US20070219650	Pub Dt:	09/20/2007
Title:	MASS FLOW METER OR CONTROLLER WITH INCLINATION SENSOR

Patent #:	7360448	Issue Dt:	04/22/2008	Application #:	11502308	Filing Dt:	08/10/2006
Publication #:	US20070034016	Pub Dt:	02/15/2007
Title:	ULTRASONIC FLOW SENSOR HAVING REFLECTING INTERFACE

Patent #:	7424894	Issue Dt:	09/16/2008	Application #:	11504175	Filing Dt:	08/15/2006
Publication #:	US20060272703	Pub Dt:	12/07/2006
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

Patent #:	7360551	Issue Dt:	04/22/2008	Application #:	11651231	Filing Dt:	01/09/2007
Publication #:	US20070107783	Pub Dt:	05/17/2007
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

Patent #:	NONE	Issue Dt:		Application #:	11664550	Filing Dt:	04/03/2007
Publication #:	US20080097657	Pub Dt:	04/24/2008
Title:	Method and System for Wafer Temperature Control

Patent #:	7380564	Issue Dt:	06/03/2008	Application #:	11749386	Filing Dt:	05/16/2007
Publication #:	US20070215206	Pub Dt:	09/20/2007
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

Patent #:	7412336	Issue Dt:	08/12/2008	Application #:	11788201	Filing Dt:	04/19/2007
Publication #:	US20070260412	Pub Dt:	11/08/2007
Title:	ATTITUDE INSENSITIVE FLOW DEVICE SYSTEM AND METHOD

Patent #:	7434477	Issue Dt:	10/14/2008	Application #:	11843418	Filing Dt:	08/22/2007
Publication #:	US20070288180	Pub Dt:	12/13/2007
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

Patent #:	7636640	Issue Dt:	12/22/2009	Application #:	11850505	Filing Dt:	09/05/2007
Publication #:	US20080059084	Pub Dt:	03/06/2008
Title:	MULTI-GAS FLOW DEVICE

Patent #:	7720617	Issue Dt:	05/18/2010	Application #:	11856585	Filing Dt:	09/17/2007
Publication #:	US20080000283	Pub Dt:	01/03/2008
Title:	FLOW SENSOR SIGNAL CONVERSION

Patent #:	7748268	Issue Dt:	07/06/2010	Application #:	12193584	Filing Dt:	08/18/2008
Publication #:	US20100005876	Pub Dt:	01/14/2010
Title:	THERMAL FLOW METER

Patent #:	7905139	Issue Dt:	03/15/2011	Application #:	12197888	Filing Dt:	08/25/2008
Publication #:	US20100049461	Pub Dt:	02/25/2010
Title:	MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC

Patent #:	8751180	Issue Dt:	06/10/2014	Application #:	12233405	Filing Dt:	09/18/2008
Publication #:	US20090078055	Pub Dt:	03/26/2009
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

Patent #:	7874208	Issue Dt:	01/25/2011	Application #:	12249821	Filing Dt:	10/10/2008
Publication #:	US20090095068	Pub Dt:	04/16/2009
Title:	SYSTEM FOR AND METHOD OF PROVIDING A WIDE-RANGE FLOW CONTROLLER

Patent #:	D390138	Issue Dt:	02/03/1998	Application #:	29057079	Filing Dt:	07/16/1996
Title:	INVENTORY CONTROL PROBE

Assignor

CELERITY, INC.

Exec Dt:

06/15/2009

Assignee

BROOKS INSTRUMENT, LLC

407 WEST VINE STREET

HATFIELD, PENNSYLVANIA 19440

Correspondence name and address
	DARREN W. COLLINS
	2000 MCKINNEY AVENUE
	SUITE 1900
	DALLAS, TX 75201

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