Patent Assignment Details
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| Reel/Frame: | 012683/0736 | |
| Pages: | 7 |
| | Recorded: | 03/18/2002 | | |
| Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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08838627
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Filing Dt:
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04/11/1997
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Title:
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APPARATUS AND METHOD FOR RAPID THERMAL PROCESSING (RTP) OF A PLURALITY OF SEMICONDUCTOR WAFERS
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Assignee
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| DAIMLERSTRASSE 10 |
| D-89160 DORNSTADT, GERMANY |
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Correspondence name and address
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CONNOLLY BOVE LODGE & HUTZ LLP
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PATRICIA SMINK ROGOWSKI
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1220 MARKET STREET
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P.O. BOX 2207
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WILMINGTON, DE 19899
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