Patent Assignment Details
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Reel/Frame: | 018672/0737 | |
| Pages: | 3 |
| | Recorded: | 12/22/2006 | | |
Attorney Dkt #: | ASX-069CP |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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11554996
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Filing Dt:
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10/31/2006
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Publication #:
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Pub Dt:
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04/05/2007
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Title:
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METHOD AND APPARATUS FOR PREVENTING INSTABILITIES IN RADIO-FREQUENCY PLASMA PROCESSING
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Assignee
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90 INDUSTRIAL WAY |
WILMINGTON, MASSACHUSETTS 02110 |
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Correspondence name and address
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PROSKAUER ROSE LLP
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ONE INTERNATIONAL PLACE
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BOSTON, MA 02110
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