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Reel/Frame:	058481/0740			Pages:	63
		Recorded:	12/09/2021
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 617
Page 3 of 7
Pages: 1 2 3 4 5 6 7

Patent #:	8573919	Issue Dt:	11/05/2013	Application #:	11178830	Filing Dt:	07/11/2005
Publication #:	US20070020081	Pub Dt:	01/25/2007
Title:	Substrate transport apparatus

Patent #:	8821099	Issue Dt:	09/02/2014	Application #:	11178836	Filing Dt:	07/11/2005
Publication #:	US20070009345	Pub Dt:	01/11/2007
Title:	Load port module

Patent #:	8545165	Issue Dt:	10/01/2013	Application #:	11179745	Filing Dt:	07/11/2005
Publication #:	US20060222477	Pub Dt:	10/05/2006
Title:	HIGH SPEED SUBSTRATE ALIGNER APPARATUS

Patent #:	9248568	Issue Dt:	02/02/2016	Application #:	11179762	Filing Dt:	07/11/2005
Publication #:	US20070020082	Pub Dt:	01/25/2007
Title:	UNEQUAL LINK SCARA ARM

Patent #:	8112171	Issue Dt:	02/07/2012	Application #:	11196063	Filing Dt:	08/03/2005
Publication #:	US20050267620	Pub Dt:	12/01/2005
Title:	SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE

Patent #:	8888433	Issue Dt:	11/18/2014	Application #:	11207231	Filing Dt:	08/19/2005
Publication #:	US20060088272	Pub Dt:	04/27/2006
Title:	REDUCED CAPACITY CARRIER AND METHOD OF USE

Patent #:	7806643	Issue Dt:	10/05/2010	Application #:	11210918	Filing Dt:	08/23/2005
Publication #:	US20060099054	Pub Dt:	05/11/2006
Title:	ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	11211236	Filing Dt:	08/24/2005
Publication #:	US20060104712	Pub Dt:	05/18/2006
Title:	Transportation system

Patent #:	7712808	Issue Dt:	05/11/2010	Application #:	11239272	Filing Dt:	09/29/2005
Publication #:	US20070081883	Pub Dt:	04/12/2007
Title:	END EFFECTOR WITH CENTERING GRIP

Patent #:	8161985	Issue Dt:	04/24/2012	Application #:	11247622	Filing Dt:	10/10/2005
Publication #:	US20060185692	Pub Dt:	08/24/2006
Title:	METHOD AND APPARATUS FOR CLEANING ARTICLES USED IN THE PRODUCTION OF SEMICONDUCTORS

Patent #:	NONE	Issue Dt:		Application #:	11301653	Filing Dt:	12/13/2005
Publication #:	US20070144421	Pub Dt:	06/28/2007
Title:	Chain driven positioning device methods and systems

Patent #:	7890194	Issue Dt:	02/15/2011	Application #:	11302563	Filing Dt:	12/13/2005
Publication #:	US20070135932	Pub Dt:	06/14/2007
Title:	ROBOTICS PROGRAMMING INTERFACE

Patent #:	7648327	Issue Dt:	01/19/2010	Application #:	11305256	Filing Dt:	12/16/2005
Publication #:	US20060120833	Pub Dt:	06/08/2006
Title:	WAFER ENGINE

Patent #:	NONE	Issue Dt:		Application #:	11352154	Filing Dt:	02/10/2006
Publication #:	US20060177289	Pub Dt:	08/10/2006
Title:	Unified frame for semiconductor material handling system

Patent #:	8439623	Issue Dt:	05/14/2013	Application #:	11382491	Filing Dt:	05/10/2006
Publication #:	US20060263177	Pub Dt:	11/23/2006
Title:	LINEAR SEMICONDUCTOR PROCESSING FACILITIES

Patent #:	NONE	Issue Dt:		Application #:	11386446	Filing Dt:	03/21/2006
Publication #:	US20070135933	Pub Dt:	06/14/2007
Title:	Web-based robotics simulation

Patent #:	7293811	Issue Dt:	11/13/2007	Application #:	11404536	Filing Dt:	04/14/2006
Publication #:	US20060181095	Pub Dt:	08/17/2006
Title:	ULTRA LOW CONTACT AREA END EFFECTOR

Patent #:	NONE	Issue Dt:		Application #:	11441711	Filing Dt:	05/26/2006
Publication #:	US20070183871	Pub Dt:	08/09/2007
Title:	Substrate processing apparatus

Patent #:	7959395	Issue Dt:	06/14/2011	Application #:	11442509	Filing Dt:	05/26/2006
Publication #:	US20060285945	Pub Dt:	12/21/2006
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	8398355	Issue Dt:	03/19/2013	Application #:	11442511	Filing Dt:	05/26/2006
Publication #:	US20070274810	Pub Dt:	11/29/2007
Title:	LINEARLY DISTRIBUTED SEMICONDUCTOR WORKPIECE PROCESSING TOOL

Patent #:	7515049	Issue Dt:	04/07/2009	Application #:	11449084	Filing Dt:	06/08/2006
Publication #:	US20070285253	Pub Dt:	12/13/2007
Title:	EXTENDED READ RANGE RFID SYSTEM

Patent #:	7880155	Issue Dt:	02/01/2011	Application #:	11453395	Filing Dt:	06/15/2006
Publication #:	US20070290150	Pub Dt:	12/20/2007
Title:	A SUBSTRATE ALIGNMENT APPARATUS COMPRISING A CONTROLLER TO MEASURE ALIGNMENT DURING TRANSPORT

Patent #:	NONE	Issue Dt:		Application #:	11483366	Filing Dt:	07/07/2006
Publication #:	US20070029227	Pub Dt:	02/08/2007
Title:	Workpiece support structures and apparatus for accessing same

Patent #:	7882394	Issue Dt:	02/01/2011	Application #:	11485143	Filing Dt:	07/11/2006
Publication #:	US20070067678	Pub Dt:	03/22/2007
Title:	INTELLIGENT CONDITION-MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREDICTIVE MAINTENANCE

Patent #:	7925378	Issue Dt:	04/12/2011	Application #:	11485144	Filing Dt:	07/11/2006
Publication #:	US20070071581	Pub Dt:	03/29/2007
Title:	PROCESS APPARATUS WITH ON-THE-FLY WORKPIECE CENTERING

Patent #:	7762755	Issue Dt:	07/27/2010	Application #:	11485145	Filing Dt:	07/11/2006
Publication #:	US20070098527	Pub Dt:	05/03/2007
Title:	EQUIPMENT STORAGE FOR SUBSTRATE PROCESSING APPARATUS

Patent #:	7522267	Issue Dt:	04/21/2009	Application #:	11485146	Filing Dt:	07/11/2006
Publication #:	US20070065144	Pub Dt:	03/22/2007
Title:	SUBSTRATE TRANSPORT APPARATUS WITH AUTOMATED ALIGNMENT

Patent #:	7901539	Issue Dt:	03/08/2011	Application #:	11523101	Filing Dt:	09/19/2006
Publication #:	US20080066678	Pub Dt:	03/20/2008
Title:	APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES

Patent #:	NONE	Issue Dt:		Application #:	11556584	Filing Dt:	11/03/2006
Publication #:	US20070201967	Pub Dt:	08/30/2007
Title:	REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Patent #:	7798758	Issue Dt:	09/21/2010	Application #:	11594365	Filing Dt:	11/07/2006
Publication #:	US20070189880	Pub Dt:	08/16/2007
Title:	REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	11599020	Filing Dt:	11/13/2006
Publication #:	US20080112784	Pub Dt:	05/15/2008
Title:	Load port door with simplified FOUP door sensing and retaining mechanism

Patent #:	9834378	Issue Dt:	12/05/2017	Application #:	11644240	Filing Dt:	12/22/2006
Publication #:	US20080152466	Pub Dt:	06/26/2008
Title:	Loader and buffer for reduced lot size

Patent #:	NONE	Issue Dt:		Application #:	11679829	Filing Dt:	02/27/2007
Publication #:	US20070269297	Pub Dt:	11/22/2007
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	NONE	Issue Dt:		Application #:	11681809	Filing Dt:	03/05/2007
Publication #:	US20070264106	Pub Dt:	11/15/2007
Title:	ROBOTIC COMPONENTS FOR SEMICONDUCTOR MANUFACTURING

Patent #:	8403613	Issue Dt:	03/26/2013	Application #:	11681822	Filing Dt:	03/05/2007
Publication #:	US20080014055	Pub Dt:	01/17/2008
Title:	BYPASS THERMAL ADJUSTER FOR VACUUM SEMICONDUCTOR PROCESSING

Patent #:	NONE	Issue Dt:		Application #:	11681978	Filing Dt:	03/05/2007
Publication #:	US20070286710	Pub Dt:	12/13/2007
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	7792350	Issue Dt:	09/07/2010	Application #:	11682306	Filing Dt:	03/05/2007
Publication #:	US20070285673	Pub Dt:	12/13/2007
Title:	WAFER CENTER FINDING

Patent #:	7792350	Issue Dt:	09/07/2010	Application #:	11682306	Filing Dt:	03/05/2007
Publication #:	US20070285673	Pub Dt:	12/13/2007
Title:	WAFER CENTER FINDING

Patent #:	7946800	Issue Dt:	05/24/2011	Application #:	11697390	Filing Dt:	04/06/2007
Publication #:	US20080249651	Pub Dt:	10/09/2008
Title:	SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS

Patent #:	9437469	Issue Dt:	09/06/2016	Application #:	11741416	Filing Dt:	04/27/2007
Publication #:	US20080267747	Pub Dt:	10/30/2008
Title:	INERTIAL WAFER CENTERING END EFFECTOR AND TRANSPORT APPARATUS

Patent #:	NONE	Issue Dt:		Application #:	11743105	Filing Dt:	05/01/2007
Publication #:	US20070282480	Pub Dt:	12/06/2007
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	9752615	Issue Dt:	09/05/2017	Application #:	11769651	Filing Dt:	06/27/2007
Publication #:	US20090001917	Pub Dt:	01/01/2009
Title:	REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC MOTOR

Patent #:	8823294	Issue Dt:	09/02/2014	Application #:	11769688	Filing Dt:	06/27/2007
Publication #:	US20090001907	Pub Dt:	01/01/2009
Title:	COMMUTATION OF AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM

Patent #:	7597523	Issue Dt:	10/06/2009	Application #:	11774750	Filing Dt:	07/09/2007
Publication #:	US20080031708	Pub Dt:	02/07/2008
Title:	VARIABLE LOT SIZE LOAD PORT

Patent #:	NONE	Issue Dt:		Application #:	11774760	Filing Dt:	07/09/2007
Publication #:	US20080031709	Pub Dt:	02/07/2008
Title:	VARIABLE LOT SIZE LOAD PORT

Patent #:	7585144	Issue Dt:	09/08/2009	Application #:	11774764	Filing Dt:	07/09/2007
Publication #:	US20080008564	Pub Dt:	01/10/2008
Title:	VARIABLE LOT SIZE LOAD PORT

Patent #:	NONE	Issue Dt:		Application #:	11774928	Filing Dt:	07/09/2007
Publication #:	US20080008570	Pub Dt:	01/10/2008
Title:	BRIDGE LOADPORT AND METHOD

Patent #:	NONE	Issue Dt:		Application #:	11787981	Filing Dt:	04/18/2007
Publication #:	US20080107507	Pub Dt:	05/08/2008
Title:	Reduced capacity carrier, transport, load port, buffer system

Patent #:	8267634	Issue Dt:	09/18/2012	Application #:	11803077	Filing Dt:	05/11/2007
Publication #:	US20080080963	Pub Dt:	04/03/2008
Title:	REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Patent #:	7896602	Issue Dt:	03/01/2011	Application #:	11811372	Filing Dt:	06/09/2007
Publication #:	US20070286712	Pub Dt:	12/13/2007
Title:	WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION

Patent #:	7959403	Issue Dt:	06/14/2011	Application #:	11846290	Filing Dt:	08/28/2007
Publication #:	US20080085173	Pub Dt:	04/10/2008
Title:	LINEAR SEMICONDUCTOR PROCESSING FACILITIES

Patent #:	9117859	Issue Dt:	08/25/2015	Application #:	11848845	Filing Dt:	08/31/2007
Publication #:	US20080056856	Pub Dt:	03/06/2008
Title:	Compact Processing Apparatus

Patent #:	8297319	Issue Dt:	10/30/2012	Application #:	11855484	Filing Dt:	09/14/2007
Publication #:	US20080107506	Pub Dt:	05/08/2008
Title:	CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT

Patent #:	7976263	Issue Dt:	07/12/2011	Application #:	11859752	Filing Dt:	09/22/2007
Publication #:	US20090082895	Pub Dt:	03/26/2009
Title:	INTEGRATED WAFER TRANSFER MECHANISM

Patent #:	8233696	Issue Dt:	07/31/2012	Application #:	11859754	Filing Dt:	09/22/2007
Publication #:	US20090080761	Pub Dt:	03/26/2009
Title:	SIMULTANEOUS WAFER ID READING

Patent #:	8277165	Issue Dt:	10/02/2012	Application #:	11859755	Filing Dt:	09/22/2007
Publication #:	US20090081007	Pub Dt:	03/26/2009
Title:	TRANSFER MECHANISM WITH MULTIPLE WAFER HANDLING CAPABILITY

Patent #:	7669903	Issue Dt:	03/02/2010	Application #:	11870560	Filing Dt:	10/11/2007
Publication #:	US20090096229	Pub Dt:	04/16/2009
Title:	ULTRA LOW CONTACT AREA END EFFECTOR

Patent #:	NONE	Issue Dt:		Application #:	11876854	Filing Dt:	10/23/2007
Publication #:	US20080124193	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	NONE	Issue Dt:		Application #:	11876860	Filing Dt:	10/23/2007
Publication #:	US20080219806	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	NONE	Issue Dt:		Application #:	11876865	Filing Dt:	10/23/2007
Publication #:	US20080219807	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8812150	Issue Dt:	08/19/2014	Application #:	11876869	Filing Dt:	10/23/2007
Publication #:	US20080219808	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8267632	Issue Dt:	09/18/2012	Application #:	11876876	Filing Dt:	10/23/2007
Publication #:	US20080219809	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	NONE	Issue Dt:		Application #:	11876886	Filing Dt:	10/23/2007
Publication #:	US20080219810	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	NONE	Issue Dt:		Application #:	11876887	Filing Dt:	10/23/2007
Publication #:	US20080219811	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8602716	Issue Dt:	12/10/2013	Application #:	11876896	Filing Dt:	10/23/2007
Publication #:	US20080219812	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8696298	Issue Dt:	04/15/2014	Application #:	11876902	Filing Dt:	10/23/2007
Publication #:	US20080124194	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	NONE	Issue Dt:		Application #:	11876904	Filing Dt:	10/23/2007
Publication #:	US20080124195	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	NONE	Issue Dt:		Application #:	11876910	Filing Dt:	10/23/2007
Publication #:	US20080124196	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8313277	Issue Dt:	11/20/2012	Application #:	11876915	Filing Dt:	10/23/2007
Publication #:	US20080124197	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	10444749	Issue Dt:	10/15/2019	Application #:	11877058	Filing Dt:	10/23/2007
Publication #:	US20080155443	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8639365	Issue Dt:	01/28/2014	Application #:	11877071	Filing Dt:	10/23/2007
Publication #:	US20080163094	Pub Dt:	07/03/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8639489	Issue Dt:	01/28/2014	Application #:	11877096	Filing Dt:	10/23/2007
Publication #:	US20080155442	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877153	Filing Dt:	10/23/2007
Publication #:	US20080134075	Pub Dt:	06/05/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877170	Filing Dt:	10/23/2007
Publication #:	US20080155444	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8775148	Issue Dt:	07/08/2014	Application #:	11877180	Filing Dt:	10/23/2007
Publication #:	US20080163095	Pub Dt:	07/03/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8612198	Issue Dt:	12/17/2013	Application #:	11877191	Filing Dt:	10/23/2007
Publication #:	US20080155445	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8972029	Issue Dt:	03/03/2015	Application #:	11877203	Filing Dt:	10/23/2007
Publication #:	US20080155446	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8473270	Issue Dt:	06/25/2013	Application #:	11877214	Filing Dt:	10/23/2007
Publication #:	US20080155447	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	7769482	Issue Dt:	08/03/2010	Application #:	11877228	Filing Dt:	10/23/2007
Publication #:	US20080155448	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	7899562	Issue Dt:	03/01/2011	Application #:	11877242	Filing Dt:	10/23/2007
Publication #:	US20080155449	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877264	Filing Dt:	10/23/2007
Publication #:	US20080163096	Pub Dt:	07/03/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877279	Filing Dt:	10/23/2007
Publication #:	US20080167890	Pub Dt:	07/10/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877294	Filing Dt:	10/23/2007
Publication #:	US20080134076	Pub Dt:	06/05/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	7945348	Issue Dt:	05/17/2011	Application #:	11877303	Filing Dt:	10/23/2007
Publication #:	US20080155450	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11881086	Filing Dt:	07/25/2007
Publication #:	US20080112787	Pub Dt:	05/15/2008
Title:	Removable compartments for workpiece stocker

Patent #:	NONE	Issue Dt:		Application #:	11881087	Filing Dt:	07/25/2007
Publication #:	US20090028669	Pub Dt:	01/29/2009
Title:	Removable compartments for workpiece stocker

Patent #:	8376428	Issue Dt:	02/19/2013	Application #:	11881088	Filing Dt:	07/25/2007
Publication #:	US20080131239	Pub Dt:	06/05/2008
Title:	INTEGRATED GRIPPER FOR WORKPIECE TRANSFER

Patent #:	9122272	Issue Dt:	09/01/2015	Application #:	11881089	Filing Dt:	07/25/2007
Publication #:	US20080086237	Pub Dt:	04/10/2008
Title:	Redundantable robot assembly for workpiece transfer

Patent #:	8182198	Issue Dt:	05/22/2012	Application #:	11881090	Filing Dt:	07/25/2007
Publication #:	US20080085174	Pub Dt:	04/10/2008
Title:	REDUNDANTABLE ROBOT ASSEMBLY FOR WORKPIECE TRANSFER

Patent #:	7751919	Issue Dt:	07/06/2010	Application #:	11881091	Filing Dt:	07/25/2007
Publication #:	US20080046108	Pub Dt:	02/21/2008
Title:	METHOD FOR OPERATING EQUIPMENT USING BUFFER STATION HAVING EMERGENCY ACCESS

Patent #:	8868229	Issue Dt:	10/21/2014	Application #:	11881093	Filing Dt:	07/25/2007
Publication #:	US20080041694	Pub Dt:	02/21/2008
Title:	Buffer station for stocker system

Patent #:	8272827	Issue Dt:	09/25/2012	Application #:	11891835	Filing Dt:	08/13/2007
Publication #:	US20080063496	Pub Dt:	03/13/2008
Title:	REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	11929230	Filing Dt:	10/30/2007
Publication #:	US20080073031	Pub Dt:	03/27/2008
Title:	METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING

Patent #:	7748944	Issue Dt:	07/06/2010	Application #:	11929357	Filing Dt:	10/30/2007
Publication #:	US20080089774	Pub Dt:	04/17/2008
Title:	A METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING

Patent #:	7841820	Issue Dt:	11/30/2010	Application #:	11938236	Filing Dt:	11/09/2007
Publication #:	US20080101892	Pub Dt:	05/01/2008
Title:	UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM

Patent #:	8672605	Issue Dt:	03/18/2014	Application #:	12025477	Filing Dt:	02/04/2008
Publication #:	US20080187417	Pub Dt:	08/07/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	8500388	Issue Dt:	08/06/2013	Application #:	12025516	Filing Dt:	02/04/2008
Publication #:	US20080187418	Pub Dt:	08/07/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	8197177	Issue Dt:	06/12/2012	Application #:	12025541	Filing Dt:	02/04/2008
Publication #:	US20080232947	Pub Dt:	09/25/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	NONE	Issue Dt:		Application #:	12025582	Filing Dt:	02/04/2008
Publication #:	US20080232948	Pub Dt:	09/25/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

100

Patent #:	9633881	Issue Dt:	04/25/2017	Application #:	12025752	Filing Dt:	02/05/2008
Publication #:	US20090196715	Pub Dt:	08/06/2009
Title:	Automatic handling buffer for bare stocker

Assignor

BROOKS AUTOMATION,INC

Exec Dt:

10/01/2021

Assignee

BROOKS AUTOMATION HOLDING, LLC

15 ELIZABETH DRIVE

CHELMSFORD, MASSACHUSETTS 01824

Correspondence name and address
	PERMAN AND GREEN LLP
	99 HAWLEY LANE
	STRATFORD, CT 06614

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